High-speed vertical positioning for contact-mode atomic force microscopy

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Volumn , Issue , 2009, Pages 522-527

  Fleming, Andrew J ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPES; BANDWIDTH LIMITATION; DUAL STAGE; FEEDBACK CONTROLLER; FEEDBACK ERROR; FEEDBACK SYSTEMS; HIGH-SPEED; LOW FREQUENCY; MECHANICAL RESONANCE; SCANNING PROBE MICROSCOPE; SPEED INCREASE; TIP-SAMPLE INTERACTION;

ASYMPTOTIC ANALYSIS; ATOMIC FORCE MICROSCOPY; IMAGE QUALITY; MECHATRONICS; PROBES; SCANNING; SPEED;

INTELLIGENT MECHATRONICS;

EID: 70350448883     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/AIM.2009.5229959     Document Type: Conference Paper

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