Microfabrication of diamond films by localized electron beam chemical vapour deposition

Semiconductor Science and Technology

Volumn 17, Issue 10, 2002, Pages 1096-1100

  Kiyohara, Shuji ^a   Takamatsu, Hideaki ^a   Mori, Katsumi ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; ELECTRIC POTENTIAL; ELECTRON BEAMS; SILICON; SUBSTRATES;

MICROFABRICATION;

DIAMOND FILMS;

EID: 0036800725     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/17/10/311     Document Type: Article

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