Miniature and MEMS-type vacuum sensors and pumps

Vacuum

Volumn 83, Issue 12, 2009, Pages 1419-1426

  Górecka Drzazga, Anna ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Miniature vacuum gauge; Orbitron pump on chip; Vacuum MEMS; Vacuum pump; Vacuum sensor

Indexed keywords

ION MASS SPECTROMETER; MEMSDEVICES; MINIATURE VACUUM GAUGE; ON CHIPS; ON-WAFER; ORBITRON PUMP ON-CHIP; ORBITRON PUMPS; PACKAGE LEVELS; RESEARCH AND DEVELOPMENT; VACUUM GAUGES; VACUUM MEASUREMENTS;

FREE ELECTRON LASERS; GAGES; LASERS; MASS SPECTROMETRY; MEMS; MICROELECTROMECHANICAL DEVICES; PUMPING (LASER); SENSORS; VACUUM; VACUUM GAGES; VACUUM PUMPS;

VACUUM TECHNOLOGY;

EID: 67651005117     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.05.003     Document Type: Article

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