A micro-pirani vacuum gauge based on micro-hotplate technology

Sensors and Actuators, A: Physical

Volumn 126, Issue 2, 2006, Pages 300-305

  Zhang, F T ^a   Tang, Z ^a   Yu, J ^a   Jin, R C ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Micro hotplate; Micro Pirani vacuum gauge; Pressure sensor; Surface micromachining; Thermal sensor

Indexed keywords

MICRO-HOTPLATE; MICRO-PIRANI VACUUM GAUGE; PRESSURE SENSOR; SURFACE MICROMACHINING; THERMAL SENSOR;

FABRICATION; FOURIER TRANSFORMS; HEAT CONDUCTION; HEAT LOSSES; HEAT TREATMENT; TEMPERATURE DISTRIBUTION; VAPOR DEPOSITION;

VACUUM GAGES;

EID: 31544439617     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.10.016     Document Type: Article

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