Vacuum pressure thermal thin-film sensor

Vacuum

Volumn 53, Issue 3, 1999, Pages 373-376

  Berlicki, T M ^a   Osadnik, S J ^a   Prociow E L ^a  

^a TU Wroclaw   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT RADIATION; HEAT TRANSFER; PRESSURE MEASUREMENT; REFLECTIVE COATINGS; THICKNESS MEASUREMENT; THIN FILM DEVICES; VACUUM APPLICATIONS;

THERMOPILE INTEGRATED SENSOR; VACUUM PRESSURE;

SENSORS;

EID: 0033149142     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00343-1     Document Type: Article

References (5)

1. Van Herwaarden AW, Sarro PM. Thermal sensors based on the Seebeck effect. Sensors and Actuators 1986;10:321-346.
2. -3 Pa. J Vac Sci Technol 1978;15:761-3.
3. Shioyama T, Ogawa S, Takiquchi K, Yotsuya T, Yoshitake M. Gas pressure measurement using TaN thin film sensor. Proc 1st Sensor Symp 1981:147-50.
4. Jin-Biao H, Qin-Yi T. Integrated multi-function sensor for flow velocity, temperature and vacuum measurements. Sensors and Actuators 1989;19:3-11.
5. Kleckner TC, Lawson RPW, Robinson AM. Constant power operation of incandescent micromachined polysilicon microsensor for use as vacuum pressure sensor. J Vac Sci Technol A 1997;15(5):2812-5.