Gas concentration analysis with a quartz friction vacuum gauge

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 479-483

  Kobayashi, T ^a   Hojo, H ^a   Ono, M ^b  

^a Vacuum Products Corporation   (Japan)

^b TOHOKU NATL INDUST RES INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ARGON; CALCULATIONS; ELECTRIC IMPEDANCE; FRICTION; HELIUM; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); PRESSURE EFFECTS; PRESSURE VESSELS; QUARTZ; TUNING;

COEFFICIENT OF VISCOSITY; GAS CONCENTRATION ANALYSIS; MILLIKAN EMPIRICAL EXPRESSION; PRESSURE DEPENDENCE; QUARTZ FRICTION VACUUM GAUGE; QUARTZ OSCILLATOR; VACUUM CHAMBER;

VACUUM GAGES;

EID: 0030169447     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00004-8     Document Type: Article

References (6)

1. M Ono, M Hirata, K Kokubun and H Murakami, J Vac Sci Technol, A4, 1728 (1986).
2. T Kobayashi, H Hojo and M Ono, Vacuum, 44, 613 (1993).
3. K Kokubun, M Hirata, M Ono, H Murakami and Y Toda, J Vac Sci Technol, A5, 2450 (1987).
4. K Kokubun, M Hirata, H Murakami, Y Toda and M Ono, Vacuum, 8/9, 731 (1984).
5. K Kokubun, M Hirata, M Ono, H Murakami and Y Toda, J Vac Sci Technol, A3, 2184 (1985).
6. E H Kennard, Kinetic Theory of Gases. McGraw-Hill, New York and London (1938) p 160.