Proposal of a new structural thermal vacuum sensor with diode-thermistors combined with a micro-air-bridge heater

Microelectronics Journal

Volumn 38, Issue 2 SPEC. ISS., 2007, Pages 171-176

  Kimura, Mitsuteru ^a   Sakurai, Fumitoshi ^b   Ohta, Hirao ^b   Terada, Tomoyuki ^b  

^a TOHOKU GAKUIN UNIVERSITY   (Japan)

^b MEMS Core Co Ltd   (Japan)

Author keywords

Microheater; Pn junction; SOI; Temperature sensor; Thermal sensor; Vacuum sensor

Indexed keywords

ELECTRIC POWER UTILIZATION; FEEDBACK CONTROL; HEAT RESISTANCE; TEMPERATURE MEASUREMENT; THERMAL CONDUCTIVITY; THERMISTORS; VACUUM APPLICATIONS;

MICRO AIR BRIDGE HEATERS; MICROHEATERS; TEMPERATURE SENSORS; THERMAL VACUUM SENSORS;

MICROSENSORS;

EID: 33846577383     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2006.09.018     Document Type: Article

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