A micromachined pressure gauge for the vacuum range based on damping of a resonator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4559, Issue , 2001, Pages 103-111

  Kurth, Steffen ^a   Hiller, Karla ^a   Zichner, Norbert ^b   Mehner, Jan ^b   Iwert, Thomas ^c   Biehl, Steffen ^c   Dötzel, Wolfram ^b   Gessner, Thomas ^b  

^a FRAUNHOFER IZM   (Germany)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^c D 07407 Rudolstadt   (Germany)

Author keywords

Squeeze film damping; Tuning fork; Vacuum gauge

Indexed keywords

DAMPING; ELECTRODES; MICROMACHINING; NATURAL FREQUENCIES; OSCILLATIONS; Q FACTOR MEASUREMENT; SILICON; VACUUM GAGES;

SENSING ELECTRODES;

RESONATORS;

EID: 0035765714     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.443024     Document Type: Article

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