A MEMS friction vacuum gauge suitable for high temperature environment

Sensors and Actuators, A: Physical

Volumn 142, Issue 1, 2008, Pages 166-172

  Tenholte, D ^a   Kurth, S ^b   Gessner T ^a   Dotzel W ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b FRAUNHOFER IZM   (Germany)

Author keywords

Air damping; Gas friction; High temperature; Vacuum gauge

Indexed keywords

ELECTROSTATICS; FRICTION; HIGH TEMPERATURE APPLICATIONS; MEMS; VACUUM APPLICATIONS;

AIR DAMPING; GAS FRICTION; VACUUM GAUGE;

GAGES;

EID: 38849150299     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.05.031     Document Type: Article

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