Studies on MEMS vacuum sensor based on field emission of silicon tips array

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 199-202

  Weiren, Wen ^a   Lingyun, Wang ^a   Junchuan, Gao ^a   Daoheng, Sun ^a  

^a XIAMEN UNIVERSITY   (China)

Author keywords

Field emission; Silicon tip; Vacuum sensor

Indexed keywords

DIODES; FIELD EMISSION; MEMS; SILICON COMPOUNDS;

FIELD EMISSION CURRENTS; SILICON TIP; VACUUM SENSORS;

SENSORS;

EID: 34548135254     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352261     Document Type: Conference Paper

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