Microstructural pressure sensor based on an enhanced resonant mode hysteresis effect

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 5, 2001, Pages 1828-1832

  Brown, K B ^a   Ma, Y ^a   Allegretto, W ^a   Lawson, R P W ^a   Vermeulen, F E ^a   Robinson, A M ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; MAGNETIC HYSTERESIS; MICROSENSORS; NATURAL FREQUENCIES;

PRESSURE SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035440734     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1398541     Document Type: Article

References (14)

1. C. Gui, R. Legtenberg, H. A. C. Tilmans, J. H. J. Fluitman, and M. Elwenspoek, J. Microelectromech. Syst. 7, 122 (1998).
2. H. A. C. Tilmans and R. Legtenberg, Sens. Actuators A 45, 67 (1994).
3. S. G. Adams, F. M. Bertsch, K. A. Shaw, and N. C. MacDonald, J. Microelectromech. Syst. 7, 172 (1998).
4. M. V. Andres, K. W. H. Foulds, and M. J. Tudor, Electron. Lett. 23, 952 (1987).
5. J. R. Gilbert, G. K. Ananthasuresh, and S. D. Senturia, in Proceedings of the 1996 International Conference on Microelectromechanical Systems, p. 127.
6. Y. Ma, A. M. Robinson, W. Allegretto, T. Zhou, and R. P. W. Lawson, Can. J. Phys. 76, 747 (1998).
7. K. B. Brown, Y. Ma, A. Garcia, W. Allegretto, R. P. W. Lawson, F. E. Vermeulen, and A. M. Robinson, IEEE Can. J. Elect. Comput. Eng. 25, 43 (2000).
8. G. T. Kovas, N. I. Maluf, and K. E. Petersen, Proc. IEEE 86, 1536 (1998).
9. Y. Ma, A. M. Robinson, R. P. W. Lawson, K. B. Brown, D. Strembicke, W. Allegretto, and T. Zhou, IEEE Can. J. Elect. Comput. Eng. 25, 3 (2000).
10. K. Brown, M.Sc. thesis, University of Alberta, Edmonton, Canada, 1999 (URL: http://wwwlib.umi.com/cr/ualberta/fullcit?pMQ40030).
11. S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells (McGraw-Hill, New York, 1959).
12. B. Shen, W. Allegretto, Y. Ma, B. Yu, M. Hu, and A. M. Robinson, Sens. Mater. 9, 347 (1997).
13. D. W. Jordan and P. Smith, Nonlinear Ordinary Differential Equations, Oxford Applied Mathematics and Computing Science Series (Clarendon, Oxford, 1983).
14. K. B. Brown, W. Allegretto, F. E. Vermeulen, R. P. W. Lawson, and A. M. Robinson, in Proc. IEEE Can. Conf. Elect. Comput. Eng. 1686 (1999).