Surface engineering with ion beams: From self-organized nanostructures to ultra-smooth surfaces

Applied Physics A: Materials Science and Processing

Volumn 91, Issue 4, 2008, Pages 551-559

  Frost, F ^a   Ziberi, B ^a   Schindler, A ^a   Rauschenbach, B ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EROSION; ION BEAMS; NANOSTRUCTURED MATERIALS; SPUTTERING;

LOW-ENERGY ION-BEAM SPUTTERING; SURFACE ENGINEERING;

SURFACE ANALYSIS;

EID: 43449104209     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-008-4516-0     Document Type: Article

References (81)

1. P. Haymann, CR Acad. Sci. Paris 248, 2472 (1959)
2. M. Navez, C. Sella, D. Chaperot, CR Acad. Sci. Paris 254, 240 (1962)
3. G. Carter, M.J. Nobes, F. Paton, J.S. Williams, Radiat. Eff. 33, 65 (1977)
4. K. Elst, W. Vandervorst, J. Alay, J. Snauwaert, L. Hellemans, J. Vac. Sci. Technol. B 11, 1968 (1993)
5. G. Carter, V. Vishnyakov, Phys. Rev. B 54, 17647 (1996)
6. J.J. Vajo, R.E. Doty, E.-H. Cirlin, J. Vac. Sci. Technol. A 14, 2709 (1996)
7. Z.X. Jiang, P.F.A. Alkemade, Appl. Phys. Lett. 73, 315 (1998)
8. J. Erlebacher, M.J. Aziz, E. Chason, M.B. Sinclair, J.A. Floro, Phys. Rev. Lett. 82, 2330 (1999)
9. J. Erlebacher, M.J. Aziz, E. Chason, M.B. Sinclair, J.A. Floro, J. Vac. Sci. Technol. A 18, 115 (2000)
10. A.-D. Brown, J. Erlebacher, W.L. Chan, E. Chason, Phys. Rev. Lett. 95, 056101 (2005)
11. A.-D. Brown, J. Erlebacher, Phys. Rev. B 72, 075350 (2005)
12. T.K. Chini, M.K. Sanyal, S.R. Bhattacharyya, Phys. Rev. B 66, 153404 (2002)
13. S. Hazra, T.K. Chini, M.K. Sanyal, J. Grenzer, U. Pietsch, Phys. Rev. B 70, 121307 (2004)
14. E. Chason, T.M. Mayer, B.K. Kellerman, D.T. McIlroy, A.J. Howard, Phys. Rev. Lett. 72, 3040 (1994)
15. S.W. MacLaren, J.E. Baker, N.L. Finnegan, C.M. Loxton, J. Vac. Sci. Technol. A 10, 468 (1992)
16. J.B. Malherbe, CRC Crit. Rev. Solid State Mater. Sci. 19, 55 (1994) and references therein
17. C.M. Demanet, J.B. Malherbe, N.G. van der Berg, V. Sankar, Surf. Interface Anal. 23, 433 (1995)
18. C.M. Demanet, K.V. Sankar, J.B. Malherbe, N.G. van der Berg, R.Q. Odendaal, Surf. Interface Anal. 24, 497 (1996)
19. C.M. Demanet, K.V. Sankar, J.B. Malherbe, Surf. Interface Anal. 24, 503 (1996)
20. S. Rusponi, G. Costantini, C. Boragno, U. Valbusa, Phys. Rev. Lett. 81, 4184 (1998)
21. S. Rusponi, G. Costantini, C. Boragno, U. Valbusa, Phys. Rev. Lett. 81, 2735 (1998)
22. S. Rusponi, C. Boragno, U. Valbusa, Phys. Rev. Lett. 78, 2795 (1997)
23. W.L. Chan, N. Pavenayotin, E. Chason, Phys. Rev. B 69, 245413 (2004)
24. W.L. Chan, E. Chason, Phys. Rev. B 72, 165418 (2005)
25. T.M. Mayer, E. Chason, A.J. Howard, J. Appl. Phys. 76, 1633 (1994)
26. C.C. Umbach, R.L. Headrick, K.-C. Chang, Phys. Rev. Lett. 87, 246104 (2001)
27. D. Flamm, F. Frost, D. Hirsch, Appl. Surf. Sci. 179, 95 (2001))
28. A. Toma, F. Buatier de Mongeot, R. Buzio, G. Firpo, S.R. Bhattacharyya, C. Boragno, U. Valbusa, Nucl. Instrum. Methods B 230, 551 (2005)
29. S. Habenicht, W. Bolse, K.P. Lieb, K. Reimann, U. Geyer, Phys. Rev. B 60, R2200 (1999)
30. S. Habenicht, W. Bolse, H. Feldermann, U. Geyer, H. Hofsäss, K.P. Lieb, F. Roccaforte, Europhys. Lett. 50, 209 (2000)
31. S. Habenicht, K.P. Lieb, W. Bolse, U. Geyer, F. Roccaforte, C. Ronning, Nucl. Instrum. Methods B 161-163, 958 (2000)
32. S. Habenicht, Phys. Rev. B 63, 125419 (2001)
33. A. Datta, Y.-R. Wu, Y.L. Wang, Phys. Rev. B 63, 125407 (2001)
34. E. Spiller, Appl. Phys. Lett. 54, 2293 (1989)
35. S. Facsko, T. Dekorsy, C. Koerdt, C. Trappe, H. Kurz, A. Vogt, H.L. Hartnagel, Science 285, 1551 (1999)
36. F. Frost, A. Schindler, F. Bigl, Phys. Rev. Lett. 85, 4116 (2000)
37. R. Gago, L. Vázquez, R. Cuerno, M. Varela, C. Ballesteros, J.M. Albella, Appl. Phys. Lett. 78, 3316 (2001)
38. P. Sigmund, Phys. Rev. 184, 383 (1969)
39. P. Sigmund, J. Mater. Sci. 8, 1545 (1973)
40. R.M. Bradley, J.M.E. Harper, J. Vac. Sci. Technol. A 6, 2390 (1988)
41. R. Cuerno, A.-L. Barabási, Phys. Rev. Lett. 74, 4746 (1995)
42. R. Cuerno, H.A. Makse, S. Tomassone, S.T. Harrington, H.E. Stanley, Phys. Rev. Lett. 75, 4464 (1995)
43. M. Rost, J. Krug, Phys. Rev. Lett. 75, 3894 (1995)
44. S. Park, B. Kahng, H. Jeong, A.-L. Barabási, Phys. Rev. Lett. 83, 3486 (1999)
45. M.A. Makeev, R. Cuerno, A.-L. Barabási, Nucl. Instrum. Methods B 197, 185 (2002)
46. R.M. Bradley, Phys. Rev. E 54, 6149 (1996)
47. M. Castro, R. Cuerno, L. Vàzquez, R. Gago, Phys. Rev. Lett. 94, 016102 (2005)
48. S. Vogel, S.J. Linz, Phys. Rev. B 72, 035416 (2005)
49. S. Vogel, S.J. Linz, Europhys. Lett. 76, 884 (2006)
50. G. Carter, J. Phys. D Appl. Phys. 34, R1 (2001)
51. U. Valbusa, C. Boragno, F. Buatier de Mongeot, J. Phys.: Condens. Matter 14, 8153 (2002)
52. W.-L. Chan, E. Chasoner, J. Appl. Phys. 101, 121301 (2007)
53. R. Behrisch, in Sputtering by Particle Bombardment: Experiments and Computer Calculations From Threshold to MeV Energies (Top. Appl. Phys. 110), ed. by R. Behrisch, W. Eckstein (Springer, Berlin Heidelberg New York, 2007)
54. S. Facsko, H. Kurz, T. Dekorsy, Phys. Rev. B 63, 165329 (2001)
55. S. Facsko, T. Bobek, H. Kurz, T. Dekorsy, S. Kyrsta, R. Cremer, Appl. Phys. Lett. 80, 130 (2002)
56. F. Frost, B. Rauschenbach, Appl. Phys. A 77, 1 (2003)
57. F. Frost, B. Ziberi, T. Höche, B. Rauschenbach, Nucl. Instrum. Methods B 216, 9 (2004)
58. M. Tartz, Ph.D. thesis, University of Leipzig (2003)
59. B. Ziberi, F. Frost, B. Rauschenbach, T. Höche, Appl. Phys. Lett. 87, 033113 (2005)
60. B. Ziberi, F. Frost, T. Höche, B. Rauschenbach, Phys. Rev. B 72, 235310 (2005)
61. B. Ziberi, F. Frost, B. Rauschenbach, Surf. Sci. 600, 3757 (2006)
62. B. Ziberi, F. Frost, B. Rauschenbach, J. Vac. Sci. Technol. A 24, 1344 (2006)
63. B. Ziberi, F. Frost, B. Rauschenbach, Appl. Phys. Lett. 88, 173115 (2006)
64. B. Ziberi, F. Frost, M. Tartz, H. Neumann, B. Rauschenbach, Appl. Phys. Lett. 92, 063102 (2008)
65. B. Ziberi, Ion Beam Induced Pattern Formation on Si and Ge Surfaces, Ph.D. thesis (Engelsdorfer Verlag, 2007)
66. F. Frost, B. Ziberi, B. Rauschenbach, to be published
67. B. Ziberi, F. Frost, H. Neumann, B. Rauschenbach, Thin Solid Films 459, 106 (2004)
68. M. Moseler, P. Gumbsch, C. Casiraghi, A.C. Ferrari, J. Robertson, Science 309, 1545 (2005)
69. W. Eckstein, Computer Simulation of Ion-Solid Interactions (Springer Ser. Mater. Sci. 10) (Springer, Berlin, 1991)
70. F. Frost, A. Schindler, F. Bigl, Appl. Phys. A 66, 663 (1998)
71. F. Frost, G. Lippold, K. Otte, D. Hirsch, A. Schindler, F. Bigl, J. Vac. Sci. Technol. A 17, 793 (1999)
72. A. Schindler, T. Hänsel, F. Frost, G. Böhm, W. Frank, A. Nickel, T. Arnold, R. Schwabe, S. Gürtler, S. Görsch, B. Rauschenbach, Glass Sci. Technol. 78(Suppl. C), 111 (2005)
73. T. Hänsel, F. Frost, A. Nickel, A. Schindler, Vak. Forsch. Prax. 19, 24 (2007)
74. R. Fechner, A. Schindler, T. Hänsel, F. Bigl, in Precision Science and Technology for Perfect Surfaces, ed. by Y. Furukawa, Y. Mori, T. Kataoka (The Japan Society for Precision Engineering, Tokyo, 1999), p. 249
75. F. Frost, R. Fechner, B. Ziberi, D. Flamm, A. Schindler, Thin Solid Films 459, 100 (2004)
76. F. Frost, R. Fechner, D. Flamm, B. Ziberi, W. Frank, A. Schindler, Appl. Phys. A 78, 651 (2004)
77. L. Aschke, M. Schweizer, J. Alkemper, A. Schindler, F. Frost, T. Hänsel, R. Fechner, U.S. Patent 7,279,252 B2 (2004)
78. F. Frost, H. Takino, R. Fechner, A. Schindler, N. Ohi, K. Nomura, in Towards the Synthesis of Micro-/Nano-systems, ed. by F. Kimura, K. Horio (Springer, London, 2006), p. 239
79. F. Frost, H. Takino, R. Fechner, A. Schindler, N. Ohi, K. Nomura, Japan. J. Appl. Phys. 46, 6071 (2007)
80. A. Cuenat, H.B. George, K.-C. Chang, J.M. Blakely, M.J. Aziz, Adv. Mater. 17, 2845 (2005)
81. F. Frost, B. Ziberi, T. Lutz, R. Böhme, K. Zimmer, R. Fechner, B. Rauschenbach, to be published