Synthesis of PECVD a-SiCXNY:H membranes as molecular sieves for small gas separation

Journal of Membrane Science

Volumn 329, Issue 1-2, 2009, Pages 130-137

  Kafrouni, Wassim ^a   Rouessac, Vincent ^a   Julbe, Anne ^a   Durand, Jean ^a  

^a INSTITUT CHARLES GERHARDT   (France)

Author keywords

Gas separation; Helium; Hydrogen; Molecular sieve membranes; PECVD; SiCN

Indexed keywords

DEPOSITED MATERIALS; ELECTRIC PLASMAS; FOURIER-TRANSFORMED INFRARED SPECTROSCOPIES; FTIR; GAS PERMEATION TESTS; GAS SEPARATION; HEXAMETHYL DISILAZANE; MOLECULAR SIEVE MEMBRANES; OXIDATIVE ATMOSPHERES; PECVD; PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITIONS; ROOM TEMPERATURES; SEM; SICN; THERMAL STABILITIES; THERMO-GRAVIMETRIC ANALYSIS;

CHEMICAL STABILITY; FILMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; GASES; GRAVIMETRIC ANALYSIS; HELIUM; HYDROGEN; INERT GASES; INFRARED SPECTROSCOPY; MEMBRANES; MOLECULAR SIEVES; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA STABILITY; PLASMAS; RADIOACTIVITY; SEMICONDUCTING SILICON COMPOUNDS; SEPARATION; SIEVES; SILICON CARBIDE; SORBENTS; SPECTROSCOPIC ANALYSIS; VAPORS;

GAS PERMEABLE MEMBRANES;

AMMONIA; HELIUM; HYDROGEN; NITROGEN;

ANALYTIC METHOD; ARTICLE; ATMOSPHERE; CHEMICAL REACTION; DILUTION; ELECTRICITY; ELLIPSOMETRY; GAS; GAS PERMEABILITY; GAS TRANSPORT; INFRARED SPECTROSCOPY; MEMBRANE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PRIORITY JOURNAL; ROOM TEMPERATURE; SCANNING ELECTRON MICROSCOPY; SYNTHESIS; THERMO GRAVIMETRIC ANALYSIS; THERMOSTABILITY;

EID: 59849101871     PISSN: 03767388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.memsci.2008.12.028     Document Type: Article

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