Strategies for high rate reactive sputtering

Thin Solid Films

Volumn 392, Issue 2, 2001, Pages 174-183

  Nadel, Steven J ^a   Greene, Phillip ^a  

^a BOC Coating Technology   (United States)

Author keywords

Deposition process; Sputtering; Titanium oxide

Indexed keywords

ANODES; CERAMIC MATERIALS; CLOSED LOOP CONTROL SYSTEMS; PLASMAS; PROCESS CONTROL; STOICHIOMETRY; TITANIUM DIOXIDE;

HIGH RATE REACTIVE SPUTTERING;

SPUTTER DEPOSITION;

EID: 0035974532     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01024-0     Document Type: Conference Paper

References (13)

1. The use of AC power on cylindrical magnetrons