In situ infrared spectroscopic study of cubic boron nitride thin film delamination

Chinese Physics B

Volumn 17, Issue 9, 2008, Pages 3453-3458

  Yang, Hang Sheng ^a   Zhang, Jian Ying ^a   Nie, An Min ^a   Zhang, Xiao Bin ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Compressive stress relax ation; Cubic boron nitride films; Delamination; Infrared spectroscopy

Indexed keywords

ABSORPTION; AMORPHOUS FILMS; BORON; COMPRESSIVE STRESS; CUBIC BORON NITRIDE; DAMPING; DELAMINATION; FORMING; FOURIER TRANSFORMS; HYSTERESIS; INFRARED ABSORPTION; INFRARED SPECTROSCOPY; NITRIDES; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SPECTROSCOPIC ANALYSIS; STEEL SHEET; STIFFNESS; STRETCHING; TENSILE STRESS; THICK FILMS; THIN FILM DEVICES; THIN FILMS;

BORON NITRIDE THIN FILMS; CHEMICAL VAPOUR DEPOSITIONS; COMPRESSIVE STRESS RELAXATIONS; CUBIC BORON NITRIDE (CBN); CUBIC BORON NITRIDE FILMS; FILM DELAMINATIONS; FOURIER-TRANSFORM; IN-SITU; INFRARED SPECTROSCOPIC STUDIES; IR ABSORPTIONS; PEAK AREAS; STRETCHING VIBRATIONS; THIN FILM DELAMINATIONS; TRANSMISSION ELECTRONS; TRANSVERSE OPTICAL PHONONS; TURBOSTRATIC;

BORON NITRIDE;

EID: 56349170353     PISSN: 16741056     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-1056/17/9/052     Document Type: Article

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