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Thin Solid Films

Volumn 483, Issue 1-2, 2005, Pages 218-221

Peculiar deformation characteristics of turbostratic boron nitride thin film

(3) Yang, Hangsheng a Iwamoto, Chihiro a Yoshida, Toyonobu a

a UNIVERSITY OF TOKYO (Japan)

Author keywords

Boron nitride; Elastic properties; Hardness; Plasma processing and deposition

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CREEP; DEFORMATION; ELASTIC MODULI; ELASTICITY; HARDNESS; HYSTERESIS; PLASMA THEORY; TEXTURES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

BORON NITRIDE; ELASTIC PROPERTIES; NANOINDENTATION; PLASMA PROCESSING AND DEPOSITION;

BORON COMPOUNDS;

EID: 18844438053 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2004.12.034 Document Type: Article

Times cited : (9)

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