Controlling the interfacial structure of cubic boron nitride thin film prepared by plasma-enhanced chemical vapor deposition

Wuli Xuebao/Acta Physica Sinica

Volumn 56, Issue 9, 2007, Pages 5400-5407

  Yang, Hang Sheng ^a   Xie, Ying Jun ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Cubic boron nitride thin film; Interface; Plasma enhanced chemical vapor deposition; Transmission electron microscopy

Indexed keywords

EID: 34548639582     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (38)