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Volumn 398, Issue 399, 2001, Pages 205-209
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Physical properties of cubic boron nitride films synthesized by PVD using a bi-step process
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Author keywords
Adhesion; Cubic boron nitride; Stress profiles
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Indexed keywords
ADHESION;
COMPRESSIVE STRESS;
CUBIC BORON NITRIDE;
DELAMINATION;
HARDNESS TESTING;
INFRARED SPECTROSCOPY;
ION BEAM ASSISTED DEPOSITION;
ION BOMBARDMENT;
NUCLEATION;
PHYSICAL VAPOR DEPOSITION;
STRESS RELIEF;
SYNTHESIS (CHEMICAL);
TRANSMISSION INFRARED SPECTROSCOPY;
THIN FILMS;
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EID: 0035506867
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(01)01440-7 Document Type: Article |
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Times cited : (10)
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References (16)
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