Observation of boron nitride thin film delamination due to humidity

Surface and Coatings Technology

Volumn 150, Issue 1, 2002, Pages 8-14

  Moller J ^a   Reiche, D ^a   Bobeth, M ^a   Pompe, W ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Boron nitride thin films; Delamination; Film buckling; Humidity; Stress analysis

Indexed keywords

BORON COMPOUNDS; BUCKLING; CHEMICAL REACTIONS; COMPRESSIVE STRESS; DELAMINATION; DIFFUSION; INTERFACES (MATERIALS); OPTICAL MICROSCOPY; SILICON; SUBSTRATES;

BORON NITRIDE THIN FILMS;

THIN FILMS;

BORON NITRIDE; DELAMINATION; FILM; HUMIDITY; SOLID LUBRICANT; STRESS-STRAIN ANALYSIS; WEAR RESISTANCE;

EID: 0036471521     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01500-6     Document Type: Article

References (11)