The influence of compressive stress on the formation of cubic boron nitride thin film

Chinese Physics

Volumn 9, Issue 6, 2000, Pages 459-463

  Deng, Jin Xiang ^a   Chen, Guang Hua ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0034196958     PISSN: 10091963     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-1963/9/6/011     Document Type: Article

References (22)

1. P.B.Mirkarimi, D.L.Medlin, K.F. McCarty, Appl. Phys. Lett., 66(1995), 2813.
2. P.B.Mirkarimi, K.F.McCarty, D.L. Medlin et al., J. Mater. Res., 9(1994), 2925.
3. G.F. Cardinale, D. C. Howitt, K.F.McCarty et al., Diamond Relat. Mater., 5(1996), 1295.
4. D.R.Mckenzie, W.D.McFall, S.Reisch et al., Surf. Coat. Technol., 78(1996), 255.
5. K. F. McCarty, D.L. Medlin, Diamond Relat. Mater., 6(1997), 1219.
6. D.R.Mckenzie, D. J. H. Cockayne, D.A.Muler et al., J. Appl. Phys., 70(1991), 3007.
7. D.L.Medlin, T.A.Friedmann, P.B.Mirkarimi et al., J.Appl. Phys., 79(1996), 3567.
8. W.D.Nix, Metall. Trans., A20(1989),2217.
9. J.F.Nye, Physical Properties of Crystals (Clarendon Press, Oxford, 1960),p.174.
10. G. F.Cardinale, D.L.Medlin, P.B. Mirkaimi et al., J. Vac. Sci. Technol., A15(1997),196.
11. B.T.Kelly, J. Nucl. Mater., 68(1977),9.
12. T.D.Sokolovskii, Inorg. Marter., 19(1983), 1311.
13. V.L.Solozhenko, U.Ya. Leonidov, Russ. J. Phys. Chem., 62(1988),1646.
14. R.S.Pease,Acta Crystallogr., 5(1952), 356.
15. V. L. Solozhenko et al., J. Phys. Chem. Solids, 51 (1990),1011.
16. V.L.Solozhenko, J. Hard. Mater., 6(1995),51.
17. G.A.Slack, S. F. Bartram, J. Appl. Phys., 46(1975),89.
18. H.Sachdev, R.Haubner, H. Noth et al., Diamond Relat. Mater., 6(1997), 286.
19. D.R. Mckenzie, W. D. McFall, W.G. Sainty et al., Diamond Relat. Mater., 2(1993), 970.
20. J. Ye, U. Rothhaar, H. Oechsner, Surf. Coat. Technol., 105(1998), 159.
21. S.Reinke, M.Kuhr, W.Kulisck, Diamond Relat. Mater., 5(1997), 508.
22. P.B.Mirkarimi, K.F.McCarty, D.L.Medlin, Mater. Sci. Engin., R21(1997), 47.