Stress analysis in cubic boron nitride films by X-ray diffraction using sin2 ψ method

Chinese Physics

Volumn 7, Issue 1, 1998, Pages 61-67

  Zhang, Xing Wang ^a   Yue, Jin Shun ^a   Chen, Guang Hua ^a,b   Yan, Hui ^b   Liu, Wen Jun ^b  

^a LANZHOU UNIVERSITY   (China)

^b BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11544289107     PISSN: 10091963     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (21)

1. M. Okamoto, H. Yokoyama and Y. Osaka, Jpn. J. Appl. Phys., 29(1990), 930.
2. S. Ulrich, J. Scherer, J. Schwan, I. Barzen and K. Jung et al., Diamond Rel. Mater., 4(1995), 288.
3. Y. Guo, Z. Song, Y. Zhang, F. Zhang and G. Chen, Phys. Stat. Sol. (a), 143(1994), K13.
4. P. B. Mirkarimi, K. F. McCarty. D. L. Medlin, W. G. Wolfer, T. A. Friedmann, E. J. Klaus, G. F. Cardinale and D. G. Howitt, J. Mater. Res., 9(1994), 2925.
5. D. R. McKenzie, W. D. McFall, W. G. Sainty, C. A. Davis and R. E. Collins, Diamond Rel. Mater., 2(1993), 970.
6. D. R. McKenzie, J. Vac. Sci. Technol., B11(1993), 1928.
7. W. Dworschak, K. Jung and H. Ehrhardt, Thin Solid Films, 254(1995), 65.
8. D. J. Kester, K. S. Ailey, D. J. Lichtenwalner and R. F. Davis, J. Vac. Sci. Technol., A12 (1994), 3074.
9. G. F. Cardinale, D. G. Howitt, K. F. McCarty, D. L. Medlin, P. B. Mirkarimi, N. R. Moody, Diamond Rel. Mater., 5(1996), 1295.
10. S. Fahy, Phys. Rev., B51(1995), 12873.
11. G. P. Lamaze, R. G. Downing, L. B. Hackenberger, L. J. Pilione and R. Messier, Diamond Rel. Mater., 3(1994), 728.
12. S. K. Choi, D. Y. Jung and H. M. Choi, J. Vac. Sci. Technol. A14(1996), 165.
13. Z. Song, F. Zhang, Y. Guo and G. Chen, Appl. Phys. Lett., 65(1994), 2669.
14. Guo Yong-ping, Song Zhi-zhong, Li Gong-chuan and Chen Guang-hua, Acta Physica Sinica (Overseas Edition), 5(1996), 143.
15. P. J. Gielisse, S. S. Mitra, J. N. Plendl, R. D. Griffis, L. C. Mansur, R. Marshall and E. A. Pascoe, Phys. Rev., 155(1967), 1039.
16. R. Geick, C. H. Penny and G. Rupprecht, Phys. Rev., 146(1966), 543.
17. T. A. Friedmann, P. B. Mirkarimi, D. L. Medlin, K. F. McCarty, E. J. Klaus, D. Boehme, H. A. Johnsen, M. J. Mills and D. K. Ottesen, J. Appl. Phys., 76(1994), 3088.
18. A. J. Perry, V. Valvoda and D. Rafaja, Thin Solid Films, 214(1992), 169.
19. A. W. Moore, J. Cryst. Growth, 106(1990), 6.
20. M. Okamoto, Y. Utsumi and Y. Osaka, Plasma Sources Sci. Technol., 2(1993), 1.
21. V. L. Solozhenko, Thermochim. Acta., 218(1993), 221.