Surface growth mechanism of cubic boron nitride thin films prepared by plasma-enhanced chemical vapor deposition

Wuli Xuebao/Acta Physica Sinica

Volumn 55, Issue 8, 2006, Pages 4238-4246

  Yang, Hang Sheng ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Cubic boron nitride thin film; Mass spectroscopy; Plasma

Indexed keywords

EID: 33748448916     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (38)