Influence of the compressive stress on the infrared absorption of s p2 -bonded boron nitride in cubic boron nitride thin films

Applied Physics Letters

Volumn 91, Issue 6, 2007, Pages

  Yang, Hangsheng ^a   Zhang, Yan ^a   Zhang, Xiaobin ^a   Xu, Yabo ^b  

^a ZHEJIANG UNIVERSITY   (China)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BORON NITRIDE; CHEMICAL BONDS; INFRARED ABSORPTION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

CUBIC PHASE UPPER LAYERS; PEAK INTENSITIES; STRETCHING VIBRATION;

COMPRESSIVE STRESS;

EID: 34547838782     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2768199     Document Type: Article

References (23)

1. P. N. Mirkarimi, K. F. McCarty, and D. L. Medlin, Mater. Sci. Eng., R. 21, 47 (1997), and references therein.
2. C. B. Samantaray and R. N. Singh, Int. Mater. Rev. 50, 313 (2005), and references therein.
3. X. W. Zhang, H. G. Boyen, N. Deyneka, P. Ziemann, F. Banhart, and M. Schreck, Nat. Mater. 2, 312 (2003).
4. W. J. Zhang, I. Bello, Y. Lifshitz, K. M. Chan, X. M. Meng, Y. Wu, C. Y. Chan, and S. T. Lee, Adv. Mater. (Weinheim, Ger.) 16, 1405 (2004).
5. H. S. Yang, C. Iwamoto, and T. Yoshida, J. Appl. Phys. 94, 1248 (2003).
6. H. S. Yang, C. Iwamoto, and T. Yoshida, Diamond Relat. Mater. 16, 642 (2007).
7. K. Nose, K. Tachibana, and T. Yoshida, Appl. Phys. Lett. 83, 943 (2003).
8. K. Nose, H. S. Yang, and T. Yoshida, Diamond Relat. Mater. 14, 1297 (2005).
9. K. Nose, H. Oba, and T. Yoshida, Appl. Phys. Lett. 89, 112124 (2006).
10. O. Tsuda, Y. Yamada, T. Fujii, and T. Yoshida, J. Vac. Sci. Technol. A 13, 2843 (1995).
11. S. Jager, K. Bewilogue, and C. P. Klages, Thin Solid Films 245, 50 (1994).
12. H. S. Yang, C. Iwamoto, and T. Yoshida, Thin Solid Films 407, 67 (2002).
13. H. S. Yang, C. Iwamoto, and T. Yoshida, J. Appl. Phys. 95, 2337 (2004).
14. G. G. Stoney, Proc. R. Soc. London, Ser. A 82, 172 (1909).
15. S. Fahy, Phys. Rev. B 51, 12873 (1995).
16. S. Fahy, C. A. Taylor, and R. Clarke, Phys. Rev. B 56, 12573 (1997).
17. P. J. Gielisse, S. S. Mitra, J. N. Plendl, R. D. Griffs, L. C. Mansur, R. Marshall, and E. A. Pascoe, Phys. Rev. 155, 1039 (1967).
18. J. Ullmann, J. E. E. Baglin, and A. J. Kellock, J. Appl. Phys. 83, 2980 (1998).
19. G. Reisse, S. Weissmantel, and D. Rost, Diamond Relat. Mater. 11, 1276 (2002).
20. Y. K. Yap, T. Aoyama, Y. Wada, M. Yoshimura, Y. Mori, and T. Sasaki, Diamond Relat. Mater. 9, 592 (2000).
21. Y. N. Zhao, B. Zhao, and Z. He, Spectrosc. Lett. 31, 945 (1998).
22. H. S. Yang, C. Iwamoto, and T. Yoshida, J. Appl. Phys. 91, 6695 (2002).
23. G. Kern, G. Kresse, and J. Hafner, Phys. Rev. B 59, 8551 (1999).