Nanostructures of the turbostratic BN transition layer in cubic BN thin films deposited by low-pressure inductively coupled plasma-enhanced chemical vapor deposition

Journal of Applied Physics

Volumn 91, Issue 10 I, 2002, Pages 6695-6699

  Yang, H S ^a   Iwamoto, C ^a   Yoshida, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BASAL PLANES; C AXIS ORIENTED; D SPACING; GROWTH STAGES; INDUCTIVELY-COUPLED; POLAR DIAGRAMS; SILICON SUBSTRATES; SUBSTRATE SURFACE; TRANSITION LAYERS; TURBOSTRATIC;

CHEMICAL VAPOR DEPOSITION; INDUCTIVELY COUPLED PLASMA; NANOSTRUCTURES; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; VAPORS;

CUBIC BORON NITRIDE;

EID: 0037095252     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1471919     Document Type: Article

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