메뉴 건너뛰기




Volumn 104, Issue 9, 2008, Pages

Damping mechanisms of single-clamped and prestressed double-clamped resonant polymer microbeams

Author keywords

[No Author keywords available]

Indexed keywords

ABS RESINS; ATMOSPHERIC PRESSURE; ATMOSPHERICS; CLIMATOLOGY; METEOROLOGY; POLYMERS; Q FACTOR MEASUREMENT; VACUUM;

EID: 56349094414     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3008032     Document Type: Article
Times cited : (76)

References (48)
  • 2
    • 27544508575 scopus 로고    scopus 로고
    • Proceedings of the Digest of Technical Papers of the 2005 International Conference on Solid State Sensors, Actuators and Microsystems, Transducers2005, (unpublished)
    • D. Bachmann, S. Kühne, and C. Hierold, Proceedings of the Digest of Technical Papers of the 2005 International Conference on Solid State Sensors, Actuators and Microsystems, Transducers2005, 2005 (unpublished), pp. 1416-1419.
    • (2005) , pp. 1416-1419
    • Bachmann, D.1    Kühne, S.2    Hierold, C.3
  • 6
    • 0034711369 scopus 로고    scopus 로고
    • 0036-8075 10.1126/science.290.5496.1540.
    • E. W. H. Jager, E. Smela, and O. Inganas, Science 0036-8075 10.1126/science.290.5496.1540 290, 1540 (2000).
    • (2000) Science , vol.290 , pp. 1540
    • Jager, E.W.H.1    Smela, E.2    Inganas, O.3
  • 12
    • 44849135850 scopus 로고    scopus 로고
    • Electrostatically actuated nonconductive polymer microresonators in gaseous and aqueous environment
    • 0924-4247
    • S. Schmid, P. Senn, and C. Hierold, Electrostatically actuated nonconductive polymer microresonators in gaseous and aqueous environment.," Sens. Actuators, A 145, 442 (2008). 0924-4247
    • (2008) Sens. Actuators, A , vol.145 , pp. 442
    • Schmid, S.1    Senn, P.2    Hierold, C.3
  • 16
    • 50049103945 scopus 로고    scopus 로고
    • Proceedings of the Transducers & Eurosensors, (unpublished)
    • K. Naeli, P. Tandon, and O. Brand, Proceedings of the Transducers & Eurosensors, 2007 (unpublished), pp. 245-248.
    • (2007) , pp. 245-248
    • Naeli, K.1    Tandon, P.2    Brand, O.3
  • 22
    • 0011006839 scopus 로고
    • 0042-207X 10.1016/0042-207X(66)91162-6.
    • R. G. Christian, Vacuum 0042-207X 10.1016/0042-207X(66)91162-6 16, 175 (1966).
    • (1966) Vacuum , vol.16 , pp. 175
    • Christian, R.G.1
  • 23
    • 35848967329 scopus 로고    scopus 로고
    • 1613-4982 10.1007/s10404-007-0175-2.
    • P. Li and R. Hu, Microfluid. Nanofluid. 1613-4982 10.1007/s10404-007- 0175-2 3, 715 (2007).
    • (2007) Microfluid. Nanofluid. , vol.3 , pp. 715
    • Li, P.1    Hu, R.2
  • 27
  • 28
    • 56349160348 scopus 로고    scopus 로고
    • MicroChem Cor, SU-8 2000 Permanent Epoxy Negative Photoresist. Application Notes.
    • MicroChem Corp., SU-8 2000 Permanent Epoxy Negative Photoresist. Application Notes.
  • 29
  • 30
    • 0037231215 scopus 로고    scopus 로고
    • 0960-1317 10.1088/0960-1317/13/1/312.
    • R. Feng and R. J. Farris, J. Micromech. Microeng. 0960-1317 10.1088/0960-1317/13/1/312 13, 80 (2003).
    • (2003) J. Micromech. Microeng. , vol.13 , pp. 80
    • Feng, R.1    Farris, R.J.2
  • 31
    • 56349106228 scopus 로고    scopus 로고
    • Hiqlab project page
    • Hiqlab project page, http://www.cims.nyu.edu/ dbindel/hiqlab/
  • 34
  • 35
    • 0942267227 scopus 로고    scopus 로고
    • 0924-4247 10.1016/j.sna.2003.09.037.
    • Z. Hao, A. Erbil, and F. Ayazi, Sens. Actuators, A 0924-4247 10.1016/j.sna.2003.09.037 109, 156 (2003).
    • (2003) Sens. Actuators, A , vol.109 , pp. 156
    • Hao, Z.1    Erbil, A.2    Ayazi, F.3
  • 36
    • 25744459153 scopus 로고
    • 10.1103/PhysRev.52.230,. 0031-899X
    • C. Zener, Phys. Rev. 10.1103/PhysRev.52.230 52, 230 (1937). 0031-899X
    • (1937) Phys. Rev. , vol.52 , pp. 230
    • Zener, C.1
  • 37
    • 0000018940 scopus 로고    scopus 로고
    • 0163-1829 10.1103/PhysRevB.61.5600.
    • R. Lifshitz and M. L. Roukes, Phys. Rev. B 0163-1829 10.1103/PhysRevB.61. 5600 61, 5600 (2000).
    • (2000) Phys. Rev. B , vol.61 , pp. 5600
    • Lifshitz, R.1    Roukes, M.L.2
  • 43
    • 0025436587 scopus 로고
    • 0032-3861 10.1016/0032-3861(90)90249-X.
    • J. R. Fried, A. Letton, and W. J. Welsh, Polymer 0032-3861 10.1016/0032-3861(90)90249-X 31, 1032 (1990).
    • (1990) Polymer , vol.31 , pp. 1032
    • Fried, J.R.1    Letton, A.2    Welsh, W.J.3
  • 45
    • 0027045169 scopus 로고
    • in, edited by V. K. Kinra and A. Wolfenden (American Society for Testing Materials, Philadelphia)
    • B. S. Berry, in M3D: Mechanics and Mechanisms of Material Damping, edited by, V. K. Kinra, and, A. Wolfenden, (American Society for Testing Materials, Philadelphia, 1992), pp. 28-44.
    • (1992) M3D: Mechanics and Mechanisms of Material Damping , pp. 28-44
    • Berry, B.S.1
  • 47
    • 0035880838 scopus 로고    scopus 로고
    • 0163-1829 10.1103/PhysRevB.64.085324.
    • M. C. Cross and R. Lifshitz, Phys. Rev. B 0163-1829 10.1103/PhysRevB.64. 085324 64, 085324 (2001).
    • (2001) Phys. Rev. B , vol.64 , pp. 085324
    • Cross, M.C.1    Lifshitz, R.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.