Characterization of epoxy resin (SU-8) film using thickness-shear mode (TSM) resonator under various conditions

Journal of Polymer Science, Part B: Polymer Physics

Volumn 42, Issue 12, 2004, Pages 2373-2384

  Hossenlpp, Jeanne ^a   Jiang, Lizhong ^b   Cernosek, Richard ^c   Josse, Fabien ^b  

^a Marquette University   (United States)

^b Marquette University   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Photoresists; Sensors; Shear modulus; Viscoelastic properties

Indexed keywords

POLYMER FILMS; STORAGE MODULUS; THICKNESS-SHEAR MODE (TSM); VISCOELASTIC PROPERTIES;

ABSORPTION; COATINGS; DIFFUSION; ELASTIC MODULI; HARMONIC ANALYSIS; PARAMETER ESTIMATION; PHOTORESISTS; QUARTZ; RESONATORS; SENSORS; VISCOELASTICITY;

EPOXY RESINS;

EID: 2942574514     PISSN: 08876266     EISSN: None     Source Type: Journal    
DOI: 10.1002/polb.20111     Document Type: Article

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