Polymeric mechanical sensors with integrated readout in a microfluidic system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5116 I, Issue , 2003, Pages 314-321

  Calleja, M ^a   Rasmussen, P ^a   Johansson, A ^a   Boisen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Biosensors; Microfluidics; Micromechanical sensors; Piezoresistive read out; Polymer cantilevers

Indexed keywords

CANTILEVER BEAMS; ELECTROSTATICS; FLUIDICS; MICROELECTROMECHANICAL DEVICES; OPTICAL PROPERTIES; READOUT SYSTEMS; SURFACE PROPERTIES; VAN DER WAALS FORCES;

CANTILEVER SENSORS; MICROFLUIDIC SYSTEM; MOLECULAR RECOGNITION; POLYMERIC MECHANICAL SENSORS;

BIOSENSORS;

EID: 0041828596     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.498934     Document Type: Conference Paper

References (20)

1. H. G. Craighead, Science 290, 1532-1535, 2000
2. D. R. Baselt, G. U. Lee, K. M. Hansen, L. A. Chrisey, R. J. Colton, Proc. IEEE 85, 672-680, 1997
3. R. Berger, Ch. Gerber, H. P. Lang, J. K. Gimzewski, Mielectrom. Eng 35, 373-379, 1997
4. R. Raiteri, M. Grattarola, h.-J. Butt, P. Sklàdal, Sensors and Actuators B 79, 115-126, 2001
5. G. Wu, H. Ji, K. Hansen, T. Thundat, R. Datar, R. Cote, M. F. Hagan, A. K. Chakraborty, A. Majumdar, Proc. Natl. Acad. Sci. USA 98, 1560-1564, 2001
6. R. Berger; E. Delamarche, H. P. Lang, C. Gerber, J. K. Gimzewski, E. Meyer, H.,-J. Guntherodt, Science 276, 2021-2023, 1997
7. J. Fritz, M. K. Baller, H. P. Lang, H. Rothuizen, P. Vettiger, E. Meyer, H. J. Güntherodt, Ch. Gerber, J. W. Gimzewski, Science 288, 316-318, 2000
8. G. Wu, R. H. Datar, K. M. Hansen, T. Thundat, J. R. Cote, A. Majumdar, Nature Biotechnology 19, 856-860, 2001
9. J. K. Gimzewski, Ch. Gerber, E. Meyer, R. R. Schlitter, Chem. Phys. Lett. 217, 5-6, 1994
10. P. A. Rasmussen, J. Thaysen, O. Hansen, S. C. Eriksen, A. Boisen, Ultramicrocopy (accepted for publication)
11. A. Boisen, J. Thaysen, H. Jensenius, O. Hansen, Ultramicroscopy 82, 11-16, 2000
12. R. Marie, H. Jensenius, J. Thaysen, C. B. Christensen, A. Boisen, Ultramicroscopy 91, 29-36, 2002
13. H. Lorenz, M. Despont, N. Fahrni, N. Labianca, P. Renaud, P. Vettiger, J. Micromech. Microeng. 7, 121-124, 1997
14. M. O. Heuschkel, L. Guerin, B. Buisson, D. Bertrand, P. Renaud, Sensors and Actuators B 48, 356-361, 1998
15. G. Genolet, J. Brugger, M. Despont, U. Drechsler, P. Vettiger, N. F. Rooij, D. Anselmetti, Rev. Sci. Instrum. 70, 2398-2401, 1999
16. J. Thaysen, A. D. Yalçinkaya, P. Vettiger, A. Menon, J. Phys. D: Apl. Phys. 35, 2698-2703, 2002
17. P. A. Rasmussen, J. Thaysen, S. Bouwstra, A. Boisen, Sensors and Actuators A 92, 96-101, 2001
18. H. Jensenius, J. Thaysen, A. A. Rasmussen, L.H. Veje, O. Hansen and A. Boisen, Appl. Phys. Lett. 76, pp. 2615-2617 (2000).
19. L. J. Guerin, M. Bossel, M. Demierre, S. Calmes, P. Renaud, Int. Conf. On solid-state Sensors and Actuators, Transducers'97, 1419-1421, 1997
20. R. I. Jackman, T. M. Floyd, R. Ghodssi, M. A. Schmidt, K. F. Jensen, J. Micromech. Microeng. 11, 263-269, 2001