Geometrical optimization of resonant cantilever sensors

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 245-248

  Naeli, Kianoush ^a   Tandon, Prateek ^a   Brand, Oliver ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Beam geometry; Cantilever; Piezoresistive detection; Quality factor; Resonant sensor

Indexed keywords

ACTUATORS; ATMOSPHERIC PRESSURE; ATMOSPHERICS; BRIDGE CIRCUITS; CANTILEVER BEAMS; MICROSYSTEMS; NONMETALS; Q FACTOR MEASUREMENT; SILICON; TRANSDUCERS;

AIR DAMPING; BEAM GEOMETRIES; BEAM GEOMETRY; CANTILEVER; CANTILEVER VIBRATIONS; DESIGN GUIDELINES; EXPERIMENTAL DATA; GEOMETRICAL OPTIMIZATIONS; INTERNATIONAL CONFERENCES; ON CHIPS; OPTIMAL LENGTH; PIEZORESISTIVE; PIEZORESISTIVE DETECTION; Q-FACTORS; QUALITY FACTOR; RESONANCE MODES; RESONANT CANTILEVERS; RESONANT SENSOR; SILICON CANTILEVERS; SOLID-STATE SENSORS; SUPPORT LOSS; THICKNESS RATIOS; WHEATSTONE BRIDGES;

SENSORS;

EID: 50049103945     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300115     Document Type: Conference Paper

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