A simple deflection-testing method to determine Poisson's ratio for MEMS applications

Journal of Micromechanics and Microengineering

Volumn 13, Issue 1, 2003, Pages 129-133

  Luo, Cheng ^a   Schneider, Thomas W ^b   White, Robert C ^b,c   Currie, John ^b   Paranjape, Makarand ^b  

^a Louisiana Tech University   (United States)

^b GEORGETOWN UNIVERSITY   (United States)

^c SCIENCE APPLICATIONS INTERNATIONAL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELASTIC MODULI; FINITE ELEMENT METHOD; POISSON DISTRIBUTION; THIN FILMS;

DEFLECTION-TESTING METHODS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037236460     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/1/318     Document Type: Article

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