Fabrication process of polymeric springs for MEMS applications

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1416-1419

  Bachmann, Daniel ^a   Kühne, Stéphane ^a   Hierold, Christofer ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMIRRORS; POLYMERIC SPRINGS; SPRING CONSTANT; WAFER-LEVEL FABRICATION TECHNIQUE;

DEFORMATION; ELECTROSTATICS; FREQUENCY RESPONSE; LEVITATION MELTING; MICROELECTROMECHANICAL DEVICES; MIRRORS; SPRINGS (COMPONENTS); STIFFNESS;

POLYMERS;

EID: 27544508575     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1497347     Document Type: Conference Paper

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