Thermally insulated structures for IR bolometers, made of polycrystalline silicon germanium alloys

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 237-240

  Sedky, Sherif ^a   Fiorini, Paolo ^a   Caymax, Matty ^a   Verbist, Agnes ^a   Baert, Chris ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; POLYCRYSTALLINE MATERIALS; THERMAL INSULATION;

SILICON GERMANIUM ALLOYS;

INFRARED DETECTORS;

EID: 0030659906     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)