A hysteresis-free platinum alloy flexure material for improved performance and reliability of MEMS devices

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1152-1155

  Brazzle, J D ^a   Taylor, W P ^a   Ganesh, B ^a   Price, J J ^a   Bernstein, J J ^a  

^a Science and Technology Division   (United States)

Author keywords

Biological materials; Conducting materials; Hysteresis; Materials reliability; Microelectromechanical devices; Micromechanical devices; Platinum alloys; Springs; Thermal conductivity; Thermal resistance

Indexed keywords

ACTUATORS; BIOCOMPATIBILITY; BIOLOGICAL MATERIALS; CORROSION RESISTANCE; DEPOSITION; ELASTIC MODULI; HEAT RESISTANCE; HYSTERESIS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PLATINUM; RUTHENIUM ALLOYS; SOLID-STATE SENSORS; SPRINGS (COMPONENTS); THERMAL CONDUCTIVITY; THERMAL CONDUCTIVITY OF SOLIDS; TRANSDUCERS;

CONDUCTING MATERIALS; CONTROL OF STRESS; DEPOSITION PARAMETERS; MATERIALS RELIABILITIES; MECHANICAL PERFORMANCE; MICROMECHANICAL DEVICE; PERFORMANCE AND RELIABILITIES; THIN FILM MATERIAL;

PLATINUM ALLOYS;

EID: 0942292221     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1216975     Document Type: Conference Paper

References (9)

1. "Properties and Selection: Nonferrous Alloys and Special Purpose Materials," in ASM Handbook, vol. 2, ASM International, pp. 707-712, 1990.
2. M. Fischer, H. Graef, W. von Munch, "Electrostatically deflectable polysilicon torsional mirrors," Sensors and Actuators A, vol. 44, pp. 83-89, 1994.
3. W. H. Juan and S. W. Pang, "Released Si microstructures fabricated by deep etching and shallow diffusion," IEEE Journal of Microelectromechanical Systems, vol. 5, pp. 18-23, 1996.
4. H. Miyajima, N. Asoaka, M. Arima, Y. Minamoto, K. Murakami, K. Tokuda, and K. Matsumoto, "A durable, shock-resistant electromagnetic optical scanner with polyimide-based hinges," IEEE Journal of Microelectromechanical Systems, vol. 10, pp. 418-424, 2001.
5. C. Marxer, M. A. Gretillat, N. F. de Rooij, R. Battig, O. Anthamatten, B. Valk, and P. Vogel, "Reliability considerations for electrostatic polysilicon actuators using as an example the REMO component," Sensors and Actuators A, vol. 61, pp. 449-454, 1997.
6. H. Nathanson, W. Newell, R. Wickstrom, and J. Davis, "The Resonant Gate Transistor," IEEE Transactions on Electron Devices, vol. ed-14, no. 3, pp. 117-133, March 1967.
7. Patent 5,696,619, "Micromechanical device having an improved beam," Knipe et. al., assigned to Texas Instruments Incorporated.
8. th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS'03), Kyoto, Japan, January 19-23, pp. 275-278, 2003.
9. Sigmund Cohn Corporation, Mount Vernon, New York.