Applications of germanium to low temperature micro-machining

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 638-643

  Li, Biao ^a   Xiong, Bin ^a   Jiang, Linan ^a   Zohar, Yitshak ^a   Wong, Man ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ETCHING; MICROMACHINING; MICROSENSORS; SEMICONDUCTING GERMANIUM;

LOW TEMPERATURE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0032639820     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)