Pulsed-laser deposition of ZnO and related compound thin films for optoelectronics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7005, Issue , 2008, Pages

  Millon, Eric ^a   Perrière, Jacques ^b   Tricot, Sylvain ^a   Boulmer Leborgne, Chantal ^a  

^a UNIVERSITÉ D'ORLÉANS   (France)

^b INSTITUT DES NANOSCIENCES DE PARIS   (France)

Author keywords

Doping; Electronics; Optics; Pulsed laser deposition; Thin film; Transparent oxide; ZnO

Indexed keywords

ARSENIC COMPOUNDS; CHLORINE COMPOUNDS; DIRECT ENERGY CONVERSION; FLAT PANEL DISPLAYS; GALLIUM; LASER ABLATION; LASER APPLICATIONS; LASERS; OPTOELECTRONIC DEVICES; PHOTONICS; PULSED LASER APPLICATIONS; PULSED LASER DEPOSITION; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTING ZINC COMPOUNDS; SILICON; SOLAR ENERGY; THICK FILMS; ZINC ALLOYS; ZINC OXIDE;

BAND-GAP MATERIALS; BLUE LIGHT EMITTING; CONDUCTING ELECTRODES; DOPING; ELECTRONIC CONDUCTORS; ELECTRONICS; FUNCTIONAL PROPERTIES; HIGH-POWER LASERS; OPTICS; ROOM TEMPERATURES; THIN FILM; THIN FILMS; TRANSPARENT OXIDE; ZNO;

ABLATION;

EID: 50249159033     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.785499     Document Type: Conference Paper

References (81)

1. Ozgur U., et al., "," J. Appl. Phys. 98, 041301 (2005)
2. Hosono H., "," Thin Solid Films 515, 6000 (2007)
3. Bagnall D.M., Chen Y.F., Zhu Z., Yao T., Koyoma S., Shen M.Y., Goto T, ","Appl. Phys. Lett 70, 2230 (1997)
4. Ohtomo A., et al., "," Mater. Sci. Engineering B 54, 24 (1998)
5. Chrisey D.B., Hubler G.K., "Pulsed Laser Deposition of Thin Films," John Wiley New York, (1994)
6. Vispute R.D., et al., "," Appl. Phys. Lett. 70, 2735 (1997)
7. Narayan J., Dovidenko K., Sharma A.K., Oktyabrsky S., "," J. Appl. Phys. 84, 2597 (1998)
8. Ohtomo A., et al, "," Appl. Phys. Lett. 75, 2635 (1999)
9. Ohtomo A., Kawasaki M., Ohkubo I., Koinuma H., Yasuda T., Segawa Y., "," Appl. Phys. Lett. 75, 980 (1999)
10. Sun H.D., et al., "," Appl. Phys. Lett. 77, 4250 (2000)
11. Sankur H., Cheung J.T., "," J. Vac. Sci. Technol. A1, 1806 (1983)
12. Ianno N.J., McConville L., "," Shaikh N., Pittal S., Snyder P.G, ","Thin Solid Films, 220, 92 (1992)
13. Perrière J., Millon E., Seiler W., Leborgne C., Craciun V., Albert O., Etchepare J., "," J. Appl. Phys. 91, 690 (2002)
14. Craciun V., Craciun D., "," Appl. Surf. Sci. 138-139, 218 (1999)
15. Craciun V., Elders J., Gardeniers J.G.E., Boyd I.W., "," Appl. Phys. Lett. 65, 2963(1994)
16. Claeyssens F., Cheesman A., Henley S.J., Ashfold M.N.R., "," J. Appl. Phys. 92, 6886 (2002)
17. Kim S.S., Lee B.T., ","Thin Solid Films 446, 307 (2004)
18. Craciun V., Perrière J., Bassim N., Singh R.K., Craciun D., Spear J., "," Appl. Phys. A 69, 531 (1999)
19. Craciun V., Singh R.K., Perrière J., Spear J., Craciun D., "," J. Electrochem. Soc. 147, 1077 (2000)
20. Chen Y., Bagnall D.M., Koh H.J., Park K.T., Hiraga K., Zhu Z., Yao T., "," J. Appl. Phys. 84, 3912 (1998)
21. Makino T., et al., "," Appl. Phys. Lett. 76, 3549 (2000)
22. Yin J., Liu Z.G., Liu H., Wang X.S., Zhu T., Liu J.M., "," J. Crystal Growth 220, 281 (2000)
23. Ohta H., Tanji H., Orita M., Hosono H., Kawazoe H., "Epitaxial Growth Principles and Applications," MRS Symp Warendale PA USA, 309, (1999)
24. Tiwari A., Park M., Jin C., Wang H., Kumar D., Narayan J., "," J. Mat. Res. 17, 2480 (2002)
25. Okoshi M., Higashikawa K., Hanabusa M, ","Appl. Surf. Sci. 154-155, 424 (2000)
26. Millon E., Albert O., Etchepare J., Hulin D., Seiler W., Perrière J., "," J. Appl. Phys. 88, 6937 (2000)
27. Lowndes D.H., Rouleau C.M., Thundat T.G., Duscher G., Kenik E., Pennycook S., "," J. Mater. Res. 14, 359 (1999)
28. Dinh L.M., Schildbach M.A., Balooch M., McLean II W.M. J., "," Appl. Phys. 86, 1149 (1999)
29. Mitra A., Thareja R.K., Ganesan V., Gupta A., Sahoo P.K., Kulkarni V.N., "," Appl. Surf. Sci. 174, 232. (2001)
30. Perriere J., Boumer-Leborgne C., Benzerga R., Tricot S., "," J. Phys. D : Appl. Phys. 40, 7069 (2007)
31. Mitra A., Thareja R.K., ","J. Appl. Phys. 89, 2025 (2001)
32. Jin B.J., Woo H.S., Im S., Bae S.H., Lee S.Y., "," Appl. Surf. Sci. 169 170, 521 (2001)
33. Bae S.H., Lee S.Y., Jin B.J., Im S., "," Appl. Surf. Sci. 154 155, 458 (2000)
34. Bae S.H., Lee S.Y., Jin B.J., Im S., "," Appl. Surf. Sci. 169 170, 525 (2001)
35. Zeng J.N., Low J.K., Ren Z.M., Liew T., Lu Y.F., "," Appl. Surf. Sci. 197 198, 362 (2002)
36. Shim E.U., Kang H.S., Kang J.S., Kim J.H., Lee S.Y., "," Appl. Surf. Sci. 186, 474 (2002)
37. Ong H.C., Zhu A.X.E., G.T. Du G.T., "," Appl. Phys. Lett. 80, 941 (2002)
38. Sun X.W., Kwok H.S., "," J. Appl. Phys. 86, 408 (1999)
39. Ong H.C., Li A.S.K., Du G.T., "," Appl. Phys. Lett. 78, 2667 (2001)
40. Shan F.K., Liu G.X., Lee W.J., Shin B.C., "," J. Appl. Phys. 101, 053106 (2007)
41. Pearton S.J., et al., "," J. Appl. Phys. 93, 1 (2003)
42. Van de Walle C.G., "," Physica B. 308 310, 899 (2001)
43. Kaidashev E.M., et al., ",", Appl. Phys. Lett. 82, 3901 (2003)
44. Heluani S.P., Braunstein G., Villafuerte, M. Simonelli G., Duhalde S., "," Thin Solid Films, 515, 2379 (2006)
45. Mott N.F., Davis E.A., "Electronic Processes in Non-Crystalline Materials," 2nd Edition Press Oxford, (1979)
46. Jin Z. et al., "," J. Crystal Growth. 214 215, 55 (2000)
47. Ning Z.Y., et al., "," Thin Solid Films 307, 50 (1997)
48. Matsubara K., Fons P. Iwata K., Yamada A. Niki S., "," Thin Solid Films 422, 176 (2002)
49. Agura H., Suzuki A., Matsushita T., Aoki T., Okada M., "," Thin Solid Films 445, 263 (2003)
50. Liu Y., Lian J., "," Appl. Surf. Sci., 253, 3727 (2007)
51. Ahn D.B., et al., "," Thin Solid Films 516, 1382 (2008)
52. Park S-M, Ikegani T., Ebihara K., "," Thin Solid Films 513, 90 (2006)
53. Joseph M., Tabata H., Kawai T., "," Jpn. J. Appl. Phys. 38, L1205 (1999)
54. Xiao B., et al., "," Appl. Surf. Sci., 253, 895 (2006)
55. Jun W., Yuntang Y., "," Mater. Lett. 62, 1899 (2008)
56. Yan Y., Al-Jassim M.M., Wei S.H., "," Appl. Phys. Lett., 89, 181912 (2006)
57. Park C.H., Zhang S.B., Wei S.H., "," Phys. Rev. B, 66, 073202 (2002)
58. Look D.C., et al., "," Phys. Status Solidi A, 195, 171 (2004)
59. Pan X., et al., "," Appl. Surf. Sci., 253, 5067 (2007)
60. Guo W., et al., "," Appl. Phys. Lett., 90, 242108 (2007)
61. Zhang S.B., Wei S.H., Zunger A., "," Phys. Rev. B, 63, 075205 (2001)
62. Ohta H., Kawamura K., Orita M., Hirano M., Sarakura N., Osono H., "," Appl. Phys. Lett. 77, 475 (2000)
63. Hosono H., Ohta H., Hayashi K., Orita M., Hirano M., "," J. Crystal Growth. 237 239, 496 (2002)
64. Tonooka K., Bando H., Aiura Y., "," Thin Solid Films 445, 327 (2003)
65. Tonooka K., Kikuchi N., "," Thin Solid Films 515, 2415 (2006)
66. Ajimska R.S., Vanaju K.A., Jayaraj MK., Misra P., Dixit VK., Kukreja L.M., "," Thin Solid Films 515, 7352 (2007)
67. Wei Z.P., et al., "," Appl. Phys. Lett., 90, 042113 (2007)
68. Tiwari A., Jin C., Kvit A., Kumar D., Muth J.F., Narayan J., "," Solid State. Comm. 121, 371 (2002)
69. Wakano T., Fujimora N., Morinaga Y., Abe N., Ashida A., Ito T., "," Physica E 10, 260 (2001)
70. Saeki H., Tabata H., Kawai T., "," Solid State Comm. 120, 439 (2001)
71. Fukumura T., Jin Z., Ohtomo A., Koinuma H., Kawasaki M., "," Appl. Phys. Lett. 75, 2366 (1999)
72. Ueda K., Tabata H., Kawai T., "," Appl. Phys. Lett., 79, 988 (2001)
73. Jin Z., et al., ","Appl. Phys. Lett. 79, 3824 (2001)
74. Kim J.H., Kim H., Kim D., Ihm Y.E., Choo W.K., "," Physica B 327, 304 (2003)
75. Tabata H., Saeki M., Guo S.L., Choi J.H, Kawai T., "," Physica B. 308 310, 993 (2001)
76. Prellier W., Fouchet A., Mercey B., Simon Ch., Raveau B., "," Appl. Phys. Lett. 82, 3490 (2003)
77. Yang W., et al., "," Appl. Phys. Lett. 82, 3424 (2003)
78. Ohtomo A., et al., "," Appl. Phys. Lett. 72, 2466 (1998)
79. Yang W., Vispute R.D., Choopun S., Sharma R.P., Venkatesan T., Shen H., "," Appl. Phys. Lett. 78, 2787 (2001)
80. Chia C.H., et al., "," Appl. Phys. Lett. 82, 1848 (2003)
81. Ohtomo A., et al., "," Appl. Phys. Lett. 77, 2204 (2000)