Effects of oxygen pressure on the growth of pulsed laser deposited ZnO films on Si(0 0 1)

Thin Solid Films

Volumn 446, Issue 2, 2004, Pages 307-312

  Kim, Sang Sub ^a   Lee, Byung Teak ^a  

^a Chonnam National University   (South Korea)

Author keywords

Deposition process; Growth mechanism; Laser ablation; Zinc oxide

Indexed keywords

ACOUSTIC WAVES; CRYSTALLIZATION; FILM GROWTH; LIGHT EMITTING DIODES; MICROSTRUCTURE; OXYGEN; PRESSURE EFFECTS; PULSED LASER DEPOSITION; REACTION KINETICS; SURFACE ROUGHNESS; SURFACE WAVES; ZINC OXIDE;

GRWOTH MECHANISM; SOLID-STATE LIGHTING DEVICES;

THIN FILMS;

EID: 0347380846     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.09.057     Document Type: Article

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