Coalescence of domes and superdomes at a low growth rate or during annealing: Towards the formation of flat-top superdomes

Surface Science

Volumn 602, Issue 13, 2008, Pages 2157-2161

  Richard, M I ^a,b   Chen, G ^c   Schulli T U ^a   Renaud, G ^a   Bauer, G ^c  

^a CEA GRENOBLE   (France)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^c JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

Annealing; Atomic force microscopy; Coalescence; Faceting; Germanium islands; Growth; Molecular beam epitaxy; Silicon

Indexed keywords

ANNEALING; ASPECT RATIO; DIMENSIONAL STABILITY; DOMES; GERMANIUM; GROWTH RATE; MICROFLUIDICS; MIXING; MOLECULAR BEAM EPITAXY; SILICON; STEEL ANALYSIS;

DISLOCATION NUCLEATION; ELSEVIER (CO); EVOLUTION (CO); FLAT TOP; LOW GROWTH RATE; QUENCH METHODS; SI(0 0 1); SUPERDOMES; TEMPERATURE RANGES;

EPITAXIAL GROWTH;

EID: 45849138857     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2008.04.024     Document Type: Article

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