메뉴 건너뛰기




Volumn 54, Issue 9, 2007, Pages 2304-2320

A simulation study of the switching times of 22- and 17-nm gate-length SOI nFETs on high mobility substrates and Si

Author keywords

Device simulation; Field effect transistor (FET); GaAs; Ge; In0.53Ga0.47; InP; N channel; Nonclassical CMOS; Semiconductor on insulator (SOI); Si; Switching time; Ultrathin body

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ELECTRIC INSULATORS; FIELD EFFECT TRANSISTORS; GATES (TRANSISTOR); SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING GERMANIUM; SEMICONDUCTOR DEVICE STRUCTURES; SUBSTRATES;

EID: 41749085181     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2007.902864     Document Type: Article
Times cited : (50)

References (64)
  • 1
    • 41849120094 scopus 로고    scopus 로고
    • Update
    • Online, Available
    • International Technology Roadmap for Semiconductors 2005 Update: Executive Summary, 2005. [Online]. Available: http://www.itrs.net/ Links/2005ITRS/ExecSum2005.pdf
    • (2005) Executive Summary , pp. 2005
  • 4
    • 0024919177 scopus 로고
    • Are GaAs MOSFETs worth building? A model-based comparison of Si and GaAs n-MOSFETs
    • M. V. Fischetti and S. E. Laux, "Are GaAs MOSFETs worth building? A model-based comparison of Si and GaAs n-MOSFETs," in IEDM Tech. Dig. 1989, pp. 481-484.
    • (1989) IEDM Tech. Dig , pp. 481-484
    • Fischetti, M.V.1    Laux, S.E.2
  • 5
    • 0026121721 scopus 로고
    • Monte Carlo simulation of transport in technologically significant semiconductors of the diamond and zinc-blende structures - Part II: Submicrometer MOSFET's
    • Mar
    • M. V. Fischetti and S. E. Laux, "Monte Carlo simulation of transport in technologically significant semiconductors of the diamond and zinc-blende structures - Part II: Submicrometer MOSFET's," IEEE Trans. Electron Devices, vol. 38, no. 3, pp. 650-660, Mar. 1991.
    • (1991) IEEE Trans. Electron Devices , vol.38 , Issue.3 , pp. 650-660
    • Fischetti, M.V.1    Laux, S.E.2
  • 7
    • 36449008742 scopus 로고
    • Ballistic metal-oxide-serm conductor field effect transistor
    • Oct
    • K. Natori, "Ballistic metal-oxide-serm conductor field effect transistor," J. Appl. Phys., vol. 76, no. 8, pp. 4879-4890, Oct. 1994.
    • (1994) J. Appl. Phys , vol.76 , Issue.8 , pp. 4879-4890
    • Natori, K.1
  • 8
    • 37749015227 scopus 로고    scopus 로고
    • Novel channel materials for ballistic nanoscale MOSFETs - Bandstructure effects
    • A. Rahman, G. Klimeck, and M. Lundstrom, "Novel channel materials for ballistic nanoscale MOSFETs - Bandstructure effects," in IEDM Tech. Dig., 2005, pp. 615-618.
    • (2005) IEDM Tech. Dig , pp. 615-618
    • Rahman, A.1    Klimeck, G.2    Lundstrom, M.3
  • 10
    • 33751414042 scopus 로고    scopus 로고
    • Monte Carlo simulations of sub-100 nm InGaAs MOSFETs for digital applications
    • K. Kalna, L. Yang, and A. Asenov, "Monte Carlo simulations of sub-100 nm InGaAs MOSFETs for digital applications," in Proc. ESSDERC, 2005, pp. 169-172.
    • (2005) Proc. ESSDERC , pp. 169-172
    • Kalna, K.1    Yang, L.2    Asenov, A.3
  • 12
    • 0036927506 scopus 로고    scopus 로고
    • Experimental study on carrier transport mechanism in ultrathin-body SOI n- and p-MOSFETs with SOI thickness less than 5 nm
    • K. Uchida, H. Watanabe, A. Kinoshita, J. Koga, T. Numata, and S. Takagi, "Experimental study on carrier transport mechanism in ultrathin-body SOI n- and p-MOSFETs with SOI thickness less than 5 nm," in IEDM Tech. Dig., 2002, pp. 47-50.
    • (2002) IEDM Tech. Dig , pp. 47-50
    • Uchida, K.1    Watanabe, H.2    Kinoshita, A.3    Koga, J.4    Numata, T.5    Takagi, S.6
  • 13
    • 0026116329 scopus 로고
    • Monte Carlo simulation of transport in technologically significant semiconductors of the diamond and zinc-blende structures - Part I: Homogeneous transport
    • Mar
    • M. V. Fischetti, "Monte Carlo simulation of transport in technologically significant semiconductors of the diamond and zinc-blende structures - Part I: Homogeneous transport," IEEE Trans. Electron Devices, vol. 38, no. 3, pp. 634-649, Mar. 1991.
    • (1991) IEEE Trans. Electron Devices , vol.38 , Issue.3 , pp. 634-649
    • Fischetti, M.V.1
  • 15
    • 41749110294 scopus 로고    scopus 로고
    • Theoretical study of some physical aspects of electronic transport in nMOSFETs at the 10 nm gate-length
    • Sep
    • M. V. Fischetti, T. O'Regan, S. Narayanan, C. Sachs, S. Jin, J. Kim, and Y. Zhang, "Theoretical study of some physical aspects of electronic transport in nMOSFETs at the 10 nm gate-length," IEEE Trans. Electron Devices, vol. 54, no. 9, Sep. 2007.
    • (2007) IEEE Trans. Electron Devices , vol.54 , Issue.9
    • Fischetti, M.V.1    O'Regan, T.2    Narayanan, S.3    Sachs, C.4    Jin, S.5    Kim, J.6    Zhang, Y.7
  • 16
    • 0028485365 scopus 로고
    • A unified theory of direct and indirect interband transitions under a nonuniform field
    • Aug
    • S. Tanaka, "A unified theory of direct and indirect interband transitions under a nonuniform field," Solid State Electron., vol. 37, no. 8, pp. 1543-1552, Aug. 1994.
    • (1994) Solid State Electron , vol.37 , Issue.8 , pp. 1543-1552
    • Tanaka, S.1
  • 17
    • 41849120688 scopus 로고    scopus 로고
    • Materials structures and devices focus center, Online, Available
    • Materials structures and devices focus center, 2006. [Online]. Available: http://www-mtl.mit.edu/MSD/
    • (2006)
  • 19
    • 0036923355 scopus 로고    scopus 로고
    • The effective drive current in CMOS inverters
    • M. H. Na, E. J. Nowak, W. Haensch, and J. Caj, "The effective drive current in CMOS inverters," in IEDM Tech. Dig., 2002, pp. 121-124.
    • (2002) IEDM Tech. Dig , pp. 121-124
    • Na, M.H.1    Nowak, E.J.2    Haensch, W.3    Caj, J.4
  • 20
    • 33744788929 scopus 로고    scopus 로고
    • Metrics for performance benchmarking of nanoscale Si and carbon nanotube FETs including device nonidealities
    • Jun
    • J. Deng and H.-S. P. Wong, "Metrics for performance benchmarking of nanoscale Si and carbon nanotube FETs including device nonidealities," IEEE Trans. Electron Devices, vol. 53, no. 6, pp. 1317-1322, Jun. 2006.
    • (2006) IEEE Trans. Electron Devices , vol.53 , Issue.6 , pp. 1317-1322
    • Deng, J.1    Wong, H.-S.P.2
  • 21
    • 2942571688 scopus 로고    scopus 로고
    • Analysis of quantum ballistic electron transport in ultrasmall silicon devices including space-charge and geometric effects
    • May
    • S. E. Laux, A. Kumar, and M. V. Fischetti, "Analysis of quantum ballistic electron transport in ultrasmall silicon devices including space-charge and geometric effects," J. Appl. Phys., vol. 95, no. 10, pp. 5545-5582, May 2004.
    • (2004) J. Appl. Phys , vol.95 , Issue.10 , pp. 5545-5582
    • Laux, S.E.1    Kumar, A.2    Fischetti, M.V.3
  • 22
    • 21644483575 scopus 로고    scopus 로고
    • Simulation study of Ge n-channel 7.5 nm DGFETs of arbitrary crystallographic alignment
    • S. E. Laux, "Simulation study of Ge n-channel 7.5 nm DGFETs of arbitrary crystallographic alignment," in IEDM Tech. Dig., 2004, pp. 135-138.
    • (2004) IEDM Tech. Dig , pp. 135-138
    • Laux, S.E.1
  • 23
    • 35949009958 scopus 로고
    • Monte Carlo analysis of electron transport in small semiconductor devices including band-structure and space-charge effects
    • Nov
    • M. V. Fischetti and S. E. Laux, "Monte Carlo analysis of electron transport in small semiconductor devices including band-structure and space-charge effects," Phys. Rev. B, Condens. Matter, vol. 38, no. 14, pp. 9721-9745, Nov. 1988.
    • (1988) Phys. Rev. B, Condens. Matter , vol.38 , Issue.14 , pp. 9721-9745
    • Fischetti, M.V.1    Laux, S.E.2
  • 24
    • 4243227379 scopus 로고
    • Monte Carlo study of electron transport in silicon inversion layers
    • Jul
    • M. V. Fischetti and S. E. Laux, "Monte Carlo study of electron transport in silicon inversion layers," Phys. Rev. B, Condens. Matter, vol. 48, no. 4, pp. 2244-2274, Jul. 1993.
    • (1993) Phys. Rev. B, Condens. Matter , vol.48 , Issue.4 , pp. 2244-2274
    • Fischetti, M.V.1    Laux, S.E.2
  • 25
    • 41849105633 scopus 로고    scopus 로고
    • IBM Res., Yorktown Heights, NY, 1992. Originally noted by M. V. Fischetti and D. J. Frank.
    • IBM Res., Yorktown Heights, NY, 1992. Originally noted by M. V. Fischetti and D. J. Frank.
  • 26
    • 0000805233 scopus 로고    scopus 로고
    • Long-range Coulomb interactions in small Si devices. Part I: Performance and reliability
    • Jan
    • M. V. Fischetti and S. E. Laux, "Long-range Coulomb interactions in small Si devices. Part I: Performance and reliability," J. Appl. Phys., vol. 89, no. 2, pp. 1205-1231, Jan. 2001.
    • (2001) J. Appl. Phys , vol.89 , Issue.2 , pp. 1205-1231
    • Fischetti, M.V.1    Laux, S.E.2
  • 27
    • 0025457187 scopus 로고
    • Monte Carlo analysis of semiconductor devices: The DAMOCLES program
    • Jul
    • S. E. Laux, M. V. Fischetti, and D. J. Frank, "Monte Carlo analysis of semiconductor devices: The DAMOCLES program," IBM J. Res. Develop. vol. 34, no. 4, pp. 466-494, Jul. 1990.
    • (1990) IBM J. Res. Develop , vol.34 , Issue.4 , pp. 466-494
    • Laux, S.E.1    Fischetti, M.V.2    Frank, D.J.3
  • 28
    • 41849099482 scopus 로고    scopus 로고
    • unpublished results
    • S. E. Laux, unpublished results.
    • Laux, S.E.1
  • 29
    • 33947225708 scopus 로고    scopus 로고
    • Effect of gate overlap and source/drain doping gradient on 10-nm CMOS performance
    • Dec
    • M. Liu, M. Cai, B. Yu, and Y. Taur, "Effect of gate overlap and source/drain doping gradient on 10-nm CMOS performance," IEEE Trans. Electron Devices, vol. 53, no. 12, pp. 3146-3149, Dec. 2006.
    • (2006) IEEE Trans. Electron Devices , vol.53 , Issue.12 , pp. 3146-3149
    • Liu, M.1    Cai, M.2    Yu, B.3    Taur, Y.4
  • 30
    • 36549104644 scopus 로고
    • Amphoteric native defects in semiconductors
    • May
    • W. Walukiewicz, "Amphoteric native defects in semiconductors," Appl. Phys. Lett., vol. 54, no. 21, pp. 2094-2096, May 1989.
    • (1989) Appl. Phys. Lett , vol.54 , Issue.21 , pp. 2094-2096
    • Walukiewicz, W.1
  • 31
    • 18544407214 scopus 로고
    • Intrinsic limitations to the doping of wide-gap semi-conductors
    • W. Walukiewicz, "Intrinsic limitations to the doping of wide-gap semi-conductors," Phys. B, vol. 302/303, pp. 123-134, 1991.
    • (1991) Phys. B , vol.302-303 , pp. 123-134
    • Walukiewicz, W.1
  • 33
    • 0000315287 scopus 로고    scopus 로고
    • 1-y, J. Appl. Phys., 86, no. 1, pp. 452-458, Jul. 1999.
    • 1-y," J. Appl. Phys., vol. 86, no. 1, pp. 452-458, Jul. 1999.
  • 34
    • 3042687663 scopus 로고    scopus 로고
    • Electrical and optical properties of Si-doped InP grown by solid source molecular beam epitaxy using a valved phosphorus cracker cell
    • Jun
    • H. Q. Zheng, K. Radahakrishnan, S. F. Yoon, and G. I. Ng, "Electrical and optical properties of Si-doped InP grown by solid source molecular beam epitaxy using a valved phosphorus cracker cell," J. Appl. Phys. vol. 87, no. 11, pp. 7988-7993, Jun. 2000.
    • (2000) J. Appl. Phys , vol.87 , Issue.11 , pp. 7988-7993
    • Zheng, H.Q.1    Radahakrishnan, K.2    Yoon, S.F.3    Ng, G.I.4
  • 36
    • 0035717885 scopus 로고    scopus 로고
    • The ballistic FET: Design, capacitance and speed limit
    • P. M. Solomon and S. E. Laux, "The ballistic FET: Design, capacitance and speed limit," in IEDM Tech. Dig., 2001, pp. 95-98.
    • (2001) IEDM Tech. Dig , pp. 95-98
    • Solomon, P.M.1    Laux, S.E.2
  • 37
    • 41849129768 scopus 로고    scopus 로고
    • home, Online, Available
    • Well-tempered Bulk-Si NMOSFET device home page, 2001. [Online]. Available: http://www-mtl.mit.edu/researchgroups/Well/
    • (2001) NMOSFET device
    • Bulk-Si, W.-T.1
  • 40
    • 33748575889 scopus 로고    scopus 로고
    • Continuous MOSFET performance increase with device scaling: The role of strain and channel material innovations
    • D. A. Antoniadis, I. Aberg, C. Ní Chléirigh, O. M. Nayfeh, A. Khakifirooz, and J. L. Hoyt, "Continuous MOSFET performance increase with device scaling: The role of strain and channel material innovations," IBM J. Res. Develop., vol. 50, no. 4/5, pp. 363-376, 2006.
    • (2006) IBM J. Res. Develop , vol.50 , Issue.4-5 , pp. 363-376
    • Antoniadis, D.A.1    Aberg, I.2    Ní Chléirigh, C.3    Nayfeh, O.M.4    Khakifirooz, A.5    Hoyt, J.L.6
  • 41
    • 46049095075 scopus 로고    scopus 로고
    • Transistor performance scaling: The role of virtual source velocity and its mobility dependence
    • A. Khakifirooz and D. A. Antoniadis, "Transistor performance scaling: The role of virtual source velocity and its mobility dependence," in IEDM Tech. Dig., 2006, pp. 1-4.
    • (2006) IEDM Tech. Dig , pp. 1-4
    • Khakifirooz, A.1    Antoniadis, D.A.2
  • 42
    • 41849110070 scopus 로고    scopus 로고
    • D. A. Antoniadis, private communication, Massachusetts Institute of Technology.
    • D. A. Antoniadis, private communication, Massachusetts Institute of Technology.
  • 43
    • 0031191310 scopus 로고    scopus 로고
    • Elementary scattering theory of the Si MOSFET
    • Jul
    • M. Lundstrom, "Elementary scattering theory of the Si MOSFET," IEEE Electron Device Lett., vol. 18, no. 7, pp. 361-363, Jul. 1997.
    • (1997) IEEE Electron Device Lett , vol.18 , Issue.7 , pp. 361-363
    • Lundstrom, M.1
  • 45
    • 0000642431 scopus 로고
    • Scattering by ionized impurities in semiconductors
    • H. Brooks, "Scattering by ionized impurities in semiconductors," Phys. Rev., vol. 83, no. 4, p. 879, 1951.
    • (1951) Phys. Rev , vol.83 , Issue.4 , pp. 879
    • Brooks, H.1
  • 47
    • 36149028172 scopus 로고
    • Theory of impurity scattering in semiconductors
    • Feb
    • E. Conwell and V. F. Weisskopf, "Theory of impurity scattering in semiconductors," Phys. Rev., vol. 77, no. 3, pp. 388-390, Feb. 1950.
    • (1950) Phys. Rev , vol.77 , Issue.3 , pp. 388-390
    • Conwell, E.1    Weisskopf, V.F.2
  • 48
    • 0346749990 scopus 로고
    • Phase-shift calculation of ionized impurity scattering in semiconductors
    • May
    • J. R. Meyer and F. J. Bartoli, "Phase-shift calculation of ionized impurity scattering in semiconductors," Phys. Rev. B, Condens. Matter, vol. 23, no. 10, pp. 5413-5427, May 1981.
    • (1981) Phys. Rev. B, Condens. Matter , vol.23 , Issue.10 , pp. 5413-5427
    • Meyer, J.R.1    Bartoli, F.J.2
  • 49
    • 0019016773 scopus 로고
    • Energy gap in Si and Ge: Impurity dependence
    • May
    • G. D. Mahan, "Energy gap in Si and Ge: Impurity dependence," J. Appl. Phys., vol. 51, no. 5, pp. 2634-2646, May 1980.
    • (1980) J. Appl. Phys , vol.51 , Issue.5 , pp. 2634-2646
    • Mahan, G.D.1
  • 50
    • 14344267408 scopus 로고
    • On the screening of impurity potential by conduction electrons
    • Sep
    • N. Takimoto, "On the screening of impurity potential by conduction electrons," J. Phys. Soc. Jpn., vol. 14, no. 9, pp. 1142-1158, Sep. 1959.
    • (1959) J. Phys. Soc. Jpn , vol.14 , Issue.9 , pp. 1142-1158
    • Takimoto, N.1
  • 51
    • 0000964043 scopus 로고
    • Electron scattering by ionized impurities in semiconductors
    • Oct
    • D. Chattopadhyay and H. J. Queisser, "Electron scattering by ionized impurities in semiconductors," Rev. Mod. Phys., vol. 53, no. 4, pp. 745-768, Oct. 1981.
    • (1981) Rev. Mod. Phys , vol.53 , Issue.4 , pp. 745-768
    • Chattopadhyay, D.1    Queisser, H.J.2
  • 52
    • 35949025517 scopus 로고
    • The Monte Carlo method for the solution of charge transport in semiconductors with applications to covalent materials
    • Jul
    • C. Jacoboni and L. Reggiani, "The Monte Carlo method for the solution of charge transport in semiconductors with applications to covalent materials," Rev. Mod. Phys., vol. 55, no. 3, pp. 645-705, Jul. 1983.
    • (1983) Rev. Mod. Phys , vol.55 , Issue.3 , pp. 645-705
    • Jacoboni, C.1    Reggiani, L.2
  • 53
    • 41849135295 scopus 로고    scopus 로고
    • private communication, University of Massachusetts at Amherst
    • M. V. Fischetti, private communication, University of Massachusetts at Amherst.
    • Fischetti, M.V.1
  • 56
    • 0012832787 scopus 로고
    • Electron mobility empirically related to the phosphorous concentration in silicon
    • Jun
    • G. Baccarani and P. Ostoja, "Electron mobility empirically related to the phosphorous concentration in silicon," Solid State Electron., vol. 18, no. 6, pp. 579-580, Jun. 1975.
    • (1975) Solid State Electron , vol.18 , Issue.6 , pp. 579-580
    • Baccarani, G.1    Ostoja, P.2
  • 58
    • 0008231470 scopus 로고
    • Ionized-impurity scattering in the strong-screening limit
    • Oct
    • J. R. Meyer and F. J. Bartoli, "Ionized-impurity scattering in the strong-screening limit," Phys. Rev. B, Condens. Matter, vol. 36, no. 11, pp. 5989-6000, Oct. 1987.
    • (1987) Phys. Rev. B, Condens. Matter , vol.36 , Issue.11 , pp. 5989-6000
    • Meyer, J.R.1    Bartoli, F.J.2
  • 60
    • 1642493790 scopus 로고
    • Mobility of electrons in germanium strongly doped with arsenic
    • V. I. Fistul, M. I. Iglitsyn, and E. M. Omelyanovskii, "Mobility of electrons in germanium strongly doped with arsenic," Sov. Phys. - Solid State, vol. 4, no. 4, pp. 784-785, 1962.
    • (1962) Sov. Phys. - Solid State , vol.4 , Issue.4 , pp. 784-785
    • Fistul, V.I.1    Iglitsyn, M.I.2    Omelyanovskii, E.M.3
  • 62
    • 0345963035 scopus 로고
    • Compensation in heavily doped n-type InP and GaAs
    • Oct
    • D. A. Anderson, N. Apsley, P. Davies, and P. L. Giles, "Compensation in heavily doped n-type InP and GaAs," J. Appl. Phys., vol. 58, no. 8, pp. 3059-3067, Oct. 1985.
    • (1985) J. Appl. Phys , vol.58 , Issue.8 , pp. 3059-3067
    • Anderson, D.A.1    Apsley, N.2    Davies, P.3    Giles, P.L.4
  • 63
    • 0018485492 scopus 로고
    • 1-x As
    • Jun
    • 1-x As," J. Appl. Phys., vol. 50, no. 6, pp. 4178-4183, Jun. 1979.
    • (1979) J. Appl. Phys , vol.50 , Issue.6 , pp. 4178-4183
    • Stringfellow, G.B.1
  • 64
    • 21544450211 scopus 로고
    • 0.47As in gas source and metalorganic molecular beam epitaxy using silicon tetrabromide
    • May
    • 0.47As in gas source and metalorganic molecular beam epitaxy using silicon tetrabromide," Appl. Phys. Lett., vol. 64, no. 21, pp. 2867-2869, May 1994.
    • (1994) Appl. Phys. Lett , vol.64 , Issue.21 , pp. 2867-2869
    • Jackson, S.L.1    Fresina, M.T.2    Baker, J.E.3    Stillman, G.E.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.