Design and modeling of a high-speed scanner for atomic force microscopy

Proceedings of the American Control Conference

Volumn 2006, Issue , 2006, Pages 502-507

  Schitter, Georg ^a   Åström, Karl J ^b   DeMartini, Barry ^b   Fantner, Georg E ^a   Turner, Kimberly ^b   Thurner, Philipp J ^a   Hansma, Paul K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BANDWIDTH; COMPUTER SIMULATION; MATHEMATICAL MODELS; NATURAL FREQUENCIES; TOPOGRAPHY;

SCANNER DYNAMICS; SCANNERS; TOPOGRAPHY MEASUREMENTS;

SCANNING;

EID: 33750476633     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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