Robust two-degree-of-freedom control of an atomic force microscope

Asian Journal of Control

Volumn 6, Issue 2, 2004, Pages 156-163

  Schitter, Georg ^a   Stemmer, Andreas ^a   Allgower, Frank ^b  

^a ETH ZURICH   (Switzerland)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

AFM; Fast scanning; Nanotechnology; Robust control; Scanning probe

Indexed keywords

EID: 4544275248     PISSN: 15618625     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1934-6093.2004.tb00194.x     Document Type: Article

References (22)