Rigid design of fast scanning probe microscopes using finite element analysis

Ultramicroscopy

Volumn 100, Issue 3-4, 2004, Pages 259-265

  Kindt, Johannes H ^a   Fantner, Georg E ^a   Cutroni, Jackie A ^a   Hansma, Paul K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

18,32; 68.37.Ps; AFM; Fast scanning probe microscope; FEA; Finite element analysis; Piezoscanner; Piezostack; Rigid design

Indexed keywords

ACOUSTIC NOISE; FINITE ELEMENT METHOD; FREQUENCIES; MICROSCOPES; SENSITIVITY ANALYSIS;

MECHANICAL STRUCTURES; RESONANCE FREQUENCY; SCANNING PROBE MICROSCOPES;

PRODUCT DESIGN;

ATOMIC FORCE MICROSCOPY; CONFERENCE PAPER; FINITE ELEMENT ANALYSIS; MOLECULAR PROBE; NOISE MEASUREMENT; SCANNING FORCE MICROSCOPY; VELOCITY;

ELECTRONICS; EQUIPMENT DESIGN; FINITE ELEMENT ANALYSIS; MICROSCOPY, ATOMIC FORCE;

EID: 3042654725     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2003.11.009     Document Type: Conference Paper

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