Tracking control of piezoelectric actuators

Nanotechnology

Volumn 12, Issue 1, 2001, Pages 14-20

  Li, Pengzhi ^a   Yan, Feng ^a   Ge, Chuan ^a   Zhang, Mingchao ^a  

^a CHANGCHUN INSTITUTE OF OPTICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CREEP; FEEDBACK CONTROL; HYSTERESIS; MATHEMATICAL MODELS; TRACKING (POSITION);

PIEZOELECTRIC ACTUATORS; TRACKING CONTROL;

PIEZOELECTRIC TRANSDUCERS;

EID: 0035279460     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/12/1/304     Document Type: Article

References (12)

1. A micro-positioning tool post using a piezoelectric actuator for diamond-turning machines
2. A piezoelectric-drive table and its application to micro-grinding of ceramic materials
3. A simple way to reduce hysteresis and creep when using piezoelectric actuators Japan
4. Improving the linearity of piezoelectric ceramic actuators
5. Displacement control of piezoelectric element by feedback of induced charge
6. Improvement of scanning accuracy of PZT piezoelectric actuators for feed-forward model-reference control
7. Behavioral implications of piezoelectric stack actuators for control of micromanipulation
8. Modeling hysteresis in piezoceramic actuators
9. A macroscopic theory for the existence of the hysteresis and butterfly loops in ferroelectricity
10. The behavior and calibration of some piezoelectric ceramics used in the STM