Surface chemical conversion of organosilane self-assembled monolayers with active oxygen species generated by vacuum ultraviolet irradiation of atmospheric oxygen molecules

Japanese Journal of Applied Physics

Volumn 47, Issue 1, 2008, Pages 307-312

  Kim, Young Jong ^a   Lee, Kyung Hwang ^a,b   Sano, Hikaru ^a   Han, Jiwon ^a   Ichii, Takashi ^a   Murase, Kuniaki ^a   Sugimura, Hiroyuki ^a  

^a KYOTO UNIVERSITY   (Japan)

^b Research Institute of Industrial Science and Technology (RIST)   (South Korea)

Author keywords

Atomic oxygen; Ozone; Self assembled monolayer (SAM); Surface chemical conversion; Vacuum ultraviolet (VUV) light; X ray photoelectron spectroscopy (XPS)

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONTACT ANGLE; ELLIPSOMETRY; SILANES; ULTRAVIOLET RADIATION; WAVELENGTH;

ACTIVE OXYGEN SPECIES; ATMOSPHERIC OXYGEN MOLECULES; SURFACE CHEMICAL CONVERSION; VACUUM ULTRAVIOLET (VUV) LIGHT;

SELF ASSEMBLED MONOLAYERS;

EID: 38549142372     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.307     Document Type: Article

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