Platinum OMCVD processes and precursor chemistry

Coordination Chemistry Reviews

Volumn 252, Issue 1-2, 2008, Pages 155-169

  Thurier, Cyril ^a   Doppelt, Pascal ^a  

^a CNRS Université Paris Est Créteil Val de Marne   (France)

Author keywords

OMCVD processes; Platinum precursors; Platinum thin films

Indexed keywords

EID: 36849057698     PISSN: 00108545     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ccr.2007.04.005     Document Type: Review

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