Characterization of Pt thin films deposited by metallorganic chemical vapor deposition for ferroelectric bottom electrodes

Journal of the Electrochemical Society

Volumn 144, Issue 8, 1997, Pages 2848-2854

  Kwon, Ju Hong ^a   Yoon, Soon Gil ^a,b  

^a Chungnam National University   (South Korea)

^b ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; DIELECTRIC FILMS; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRODES; MASS TRANSFER; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PLASMA APPLICATIONS; PLATINUM; SILICA; THERMAL EFFECTS; THIN FILMS;

PLASMA ENHANCED METALLORGANIC VAPOR DEPOSITION;

METALLIC FILMS;

EID: 0031212884     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837906     Document Type: Article

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