Platinum Film Growth by Chemical Vapor Deposition Based on Autocatalytic Oxidative Decomposition

Journal of the Electrochemical Society

Volumn 148, Issue 8, 2001, Pages

  Hiratani, Masahiko ^a   Nabatame, Toshihide ^a   Matsui, Yuichi ^a   Imagawa, Kazushige ^a   Kimura, Shinichiro ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000224982     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1381389     Document Type: Article

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