Preparation of Pt thin films deposited by metalorganic chemical vapor deposition for ferroelectric thin films

Thin Solid Films

Volumn 303, Issue 1-2, 1997, Pages 136-142

  Kwon, Ju Hong ^a   Yoon, Soon Gil ^a  

^a Chungnam National University   (South Korea)

Author keywords

Auger electron spectroscopy (AES); Chemical vapour deposition (CVD); Organometallic vapour deposition; Scanning electron microscopy

Indexed keywords

ACTIVATION ENERGY; DIELECTRIC FILMS; ELECTRIC CONDUCTIVITY OF SOLIDS; FERROELECTRIC MATERIALS; FILM PREPARATION; HIGH TEMPERATURE EFFECTS; MASS TRANSFER; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NUCLEATION; PLATINUM; SILICA; THIN FILMS;

GAS PHASE MASS TRANSFER;

METALLIC FILMS;

EID: 0031188989     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00003-5     Document Type: Article

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