메뉴 건너뛰기




Volumn 8, Issue , 2007, Pages 41-87

8.02 - Experimentation at the Micron and Submicron Scale

Author keywords

[No Author keywords available]

Indexed keywords

SUBMICRON SCALE;

EID: 36148941253     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B0-08-043749-4/08038-1     Document Type: Chapter
Times cited : (13)

References (51)
  • 2
    • 0036657429 scopus 로고    scopus 로고
    • A high-speed atomic force microscope for studying biological macromolecules in action
    • B
    • Ando T., Kodera N., Maruyama D., Takai E., Saito K., Toda A. A high-speed atomic force microscope for studying biological macromolecules in action. Japan. J. Appl. Phys. 2002, 41(7B):4851-4856.
    • (2002) Japan. J. Appl. Phys. , vol.41 , Issue.7 , pp. 4851-4856
    • Ando, T.1    Kodera, N.2    Maruyama, D.3    Takai, E.4    Saito, K.5    Toda, A.6
  • 4
    • 0033352518 scopus 로고    scopus 로고
    • The effects of heterogeneity and anisotropy on the size effect in cracked polycrystalline films
    • Ballarini R., Mullen R.L., Heuer A.H. The effects of heterogeneity and anisotropy on the size effect in cracked polycrystalline films. Int. J. Fract. 1999, 95:19-39.
    • (1999) Int. J. Fract. , vol.95 , pp. 19-39
    • Ballarini, R.1    Mullen, R.L.2    Heuer, A.H.3
  • 7
    • 0033300955 scopus 로고    scopus 로고
    • Characterization of organic thin film materials with near-field scanning optical microscopy (NSOM)
    • Barbara P.F., Adams D.M., O'Connor D.B. Characterization of organic thin film materials with near-field scanning optical microscopy (NSOM). Ann. Rev. Mater. Sci. 1999, 29:433-469.
    • (1999) Ann. Rev. Mater. Sci. , vol.29 , pp. 433-469
    • Barbara, P.F.1    Adams, D.M.2    O'Connor, D.B.3
  • 8
    • 0001386158 scopus 로고
    • On the estimation of the Weibull modulus
    • Bergman B. On the estimation of the Weibull modulus. J. Mater. Sci. Lett. 1984, 3:689-692.
    • (1984) J. Mater. Sci. Lett. , vol.3 , pp. 689-692
    • Bergman, B.1
  • 9
    • 0030282664 scopus 로고    scopus 로고
    • Microtribological studies of doped single-crystal silicon and polysilicon films for MEMS devices
    • Bhushan B., Koinkar V.N. Microtribological studies of doped single-crystal silicon and polysilicon films for MEMS devices. Sens. Actuat. A 1996, 57:91-102.
    • (1996) Sens. Actuat. A , vol.57 , pp. 91-102
    • Bhushan, B.1    Koinkar, V.N.2
  • 11
    • 0032614006 scopus 로고    scopus 로고
    • Accurate method for determining adhesion of cantilever beams
    • de Boer M.P., Michalske T.A. Accurate method for determining adhesion of cantilever beams. J. Appl. Phys. 1999, 86(2):817-827.
    • (1999) J. Appl. Phys. , vol.86 , Issue.2 , pp. 817-827
    • de Boer, M.P.1    Michalske, T.A.2
  • 12
    • 36849104521 scopus 로고
    • Calculated elastic constants for stress problems associated with semiconductor devices
    • Brantley W.A. Calculated elastic constants for stress problems associated with semiconductor devices. J. Appl. Phys. 1973, 44(1):534-535.
    • (1973) J. Appl. Phys. , vol.44 , Issue.1 , pp. 534-535
    • Brantley, W.A.1
  • 13
    • 0030835164 scopus 로고    scopus 로고
    • Error limitations in the determination of mechanical properties of thin films
    • Breton F.A., Knauss W.G. Error limitations in the determination of mechanical properties of thin films. J. Reinforced Plastics and Composites 1997, 16:17-32.
    • (1997) J. Reinforced Plastics and Composites , vol.16 , pp. 17-32
    • Breton, F.A.1    Knauss, W.G.2
  • 14
    • 0032138470 scopus 로고    scopus 로고
    • Surface micromachining for microelectromechanical systems
    • Bustillo J.M., Howe R.T., Muller R.S. Surface micromachining for microelectromechanical systems. Proc. IEEE 1998, 86(8):1552-1574.
    • (1998) Proc. IEEE , vol.86 , Issue.8 , pp. 1552-1574
    • Bustillo, J.M.1    Howe, R.T.2    Muller, R.S.3
  • 15
    • 0343698203 scopus 로고    scopus 로고
    • Comprehensive static characterization of vertical electrostatically actuated polysilicon beams
    • Chan E.K., Garikipati K., Dutton R.W. Comprehensive static characterization of vertical electrostatically actuated polysilicon beams. IEEE Des. Test 1999, 16(4):58-65.
    • (1999) IEEE Des. Test , vol.16 , Issue.4 , pp. 58-65
    • Chan, E.K.1    Garikipati, K.2    Dutton, R.W.3
  • 16
    • 0032296649 scopus 로고    scopus 로고
    • Mechanical properties of thin polysilicon films by means of probe microscopy
    • Chasiotis I., Knauss W.G. Mechanical properties of thin polysilicon films by means of probe microscopy. Proc. Int. Soc. Opt. Eng. (SPIE) 1998, 3512:66-75.
    • (1998) Proc. Int. Soc. Opt. Eng. (SPIE) , vol.3512 , pp. 66-75
    • Chasiotis, I.1    Knauss, W.G.2
  • 17
    • 0034542354 scopus 로고    scopus 로고
    • Microtensile tests with the aid of probe microscopy for the study of MEMS materials
    • Chasiotis I., Knauss W.G. Microtensile tests with the aid of probe microscopy for the study of MEMS materials. Proc. Int. Soc. Opt. Eng. (SPIE) 2000, 4175:96-103.
    • (2000) Proc. Int. Soc. Opt. Eng. (SPIE) , vol.4175 , pp. 96-103
    • Chasiotis, I.1    Knauss, W.G.2
  • 18
    • 0035557132 scopus 로고    scopus 로고
    • The influence of fabrication governed surface conditions on the mechanical strength of thin film materials
    • Chasiotis I., Knauss W.G. The influence of fabrication governed surface conditions on the mechanical strength of thin film materials. Mater. Res. Soc. Symp. Proc. 2000, 657:EE2.2.1-EE2.2.6.
    • (2000) Mater. Res. Soc. Symp. Proc. , vol.657
    • Chasiotis, I.1    Knauss, W.G.2
  • 19
    • 0036352336 scopus 로고    scopus 로고
    • Size effects determined from tensile tests of perforated MEMS scale specimens
    • Chasiotis I., Knauss W.G. Size effects determined from tensile tests of perforated MEMS scale specimens. Mater. Res. Soc. Symp. Proc. 2001, 687:B2.4.1-B2.4.6.
    • (2001) Mater. Res. Soc. Symp. Proc. , vol.687
    • Chasiotis, I.1    Knauss, W.G.2
  • 20
    • 0036504397 scopus 로고    scopus 로고
    • A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy
    • Chasiotis I., Knauss W.G. A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy. Exp. Mech. 2002, 42(1):51-57.
    • (2002) Exp. Mech. , vol.42 , Issue.1 , pp. 51-57
    • Chasiotis, I.1    Knauss, W.G.2
  • 21
    • 84903429476 scopus 로고    scopus 로고
    • b, The mechanical strength of polysilicon films: 1. The influence of fabrication governed surface conditions. J. Mech. Phys. Solids, submitted.
    • I. Chasiotis and W. G. Knauss, 2002b, The mechanical strength of polysilicon films: 1. The influence of fabrication governed surface conditions. J. Mech. Phys. Solids, submitted.
    • (2002)
    • Chasiotis, I.1    Knauss, W.G.2
  • 22
    • 84903429477 scopus 로고    scopus 로고
    • The mechanical strength of polysilicon films: 2. Size effects associated with elliptical perforations
    • submitted
    • I. Chasiotis and W. G. Knauss, 2002c, The mechanical strength of polysilicon films: 2. Size effects associated with elliptical perforations. J. Mech. Phys. Solids, submitted.
    • (2002) J. Mech. Phys. Solids
    • Chasiotis, I.1    Knauss, W.G.2
  • 23
    • 0027540056 scopus 로고
    • A nondestructive method for determining the spring constant of cantilevers for scanning force microscopy
    • Cleveland J.P., Manne S., Bocek D., Hansma P.K. A nondestructive method for determining the spring constant of cantilevers for scanning force microscopy. Rev. Sci. Instrum. 1993, 64(2):403-405.
    • (1993) Rev. Sci. Instrum. , vol.64 , Issue.2 , pp. 403-405
    • Cleveland, J.P.1    Manne, S.2    Bocek, D.3    Hansma, P.K.4
  • 25
    • 0001038971 scopus 로고
    • Near field microscopy and near field optics
    • Courjon D., Bainier C. Near field microscopy and near field optics. Rep. Prog. Phys. 1994, 57(10):989-1028.
    • (1994) Rep. Prog. Phys. , vol.57 , Issue.10 , pp. 989-1028
    • Courjon, D.1    Bainier, C.2
  • 27
    • 0035927973 scopus 로고    scopus 로고
    • Specimen size effect on mechanical properties of polysilicon microcantilever beams measured by deflection using a nanoindenter
    • Ding J.N., Meng Y.G., Wen S.Z. Specimen size effect on mechanical properties of polysilicon microcantilever beams measured by deflection using a nanoindenter. Mater. Sci. Eng. B 2001, 83:42-47.
    • (2001) Mater. Sci. Eng. B , vol.83 , pp. 42-47
    • Ding, J.N.1    Meng, Y.G.2    Wen, S.Z.3
  • 28
    • 84974183414 scopus 로고
    • A method for interpreting the data from depth-sensing indentation instruments
    • Doerner M.F., Nix W.D. A method for interpreting the data from depth-sensing indentation instruments. J. Mater. Res. 1986, 1:601-609.
    • (1986) J. Mater. Res. , vol.1 , pp. 601-609
    • Doerner, M.F.1    Nix, W.D.2
  • 29
    • 0030403261 scopus 로고    scopus 로고
    • Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structures
    • Dyck C.W., Smith J., Miller S., Russick E., Adkins C. Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structures. Proc. Int. Soc. Opt. Eng. (SPIE) 1996, 2879:225-235.
    • (1996) Proc. Int. Soc. Opt. Eng. (SPIE) , vol.2879 , pp. 225-235
    • Dyck, C.W.1    Smith, J.2    Miller, S.3    Russick, E.4    Adkins, C.5
  • 30
    • 3743091331 scopus 로고
    • Tensile tests on silicon whiskers
    • Eisner R.L. Tensile tests on silicon whiskers. Acta Metall. 1955, 3:414-415.
    • (1955) Acta Metall. , vol.3 , pp. 414-415
    • Eisner, R.L.1
  • 31
    • 0031101760 scopus 로고    scopus 로고
    • High-sensitivity surface micromachined structures for internal stress and stress gradient evaluation
    • Ericson F., Greek S., Soderkvist J., Schweitz J.A. High-sensitivity surface micromachined structures for internal stress and stress gradient evaluation. J. Micromech. Microeng. 1997, 7:30-36.
    • (1997) J. Micromech. Microeng. , vol.7 , pp. 30-36
    • Ericson, F.1    Greek, S.2    Soderkvist, J.3    Schweitz, J.A.4
  • 32
    • 0025414450 scopus 로고
    • Fracture toughness characterization of brittle thin films
    • Fan L.S., Howe R.T., Muller R.S. Fracture toughness characterization of brittle thin films. Sens. Actuat. A 1990, 23:872-874.
    • (1990) Sens. Actuat. A , vol.23 , pp. 872-874
    • Fan, L.S.1    Howe, R.T.2    Muller, R.S.3
  • 33
    • 0030230992 scopus 로고    scopus 로고
    • Determining mean and gradient residual stresses in thin films using micromachined cantilevers
    • Fang W., Wickert J.A. Determining mean and gradient residual stresses in thin films using micromachined cantilevers. J. Micromech. Microeng. 1996, 6:301-309.
    • (1996) J. Micromech. Microeng. , vol.6 , pp. 301-309
    • Fang, W.1    Wickert, J.A.2
  • 34
    • 0032680786 scopus 로고    scopus 로고
    • Thin film gage markers for laser-based strain measurement on MEMS materials
    • May/June 28-30.
    • J. C. Fox, R. L. Edwards and W. N. Sharpe, Jr., 1999, Thin film gage markers for laser-based strain measurement on MEMS materials. Exp. Tech., May/June, 28-30.
    • (1999) Exp. Tech.
    • Fox, J.C.1    Edwards, R.L.2    Sharpe Jr., W.N.3
  • 36
    • 0032092146 scopus 로고    scopus 로고
    • Surface versus bulk micromachining: the contest for suitable applications
    • French P.J., Sarro P.M. Surface versus bulk micromachining: the contest for suitable applications. J. Micromech. Microeng. 1998, 8:45-53.
    • (1998) J. Micromech. Microeng. , vol.8 , pp. 45-53
    • French, P.J.1    Sarro, P.M.2
  • 37
    • 0342626602 scopus 로고    scopus 로고
    • Influence of anneals in oxygen ambient on stress of thick polysilicon layers
    • Fürtsch M., Offenberg M., Münzel H., Morante J.R. Influence of anneals in oxygen ambient on stress of thick polysilicon layers. Sens. Actuat. A: Phys. 1999, 76:335-342.
    • (1999) Sens. Actuat. A: Phys. , vol.76 , pp. 335-342
    • Fürtsch, M.1    Offenberg, M.2    Münzel, H.3    Morante, J.R.4
  • 39
    • 0030234766 scopus 로고    scopus 로고
    • Determination of the spring constants of probes for force microscopy/spectroscopy
    • Gibson C.T., Watson G.S., Myhra S. Determination of the spring constants of probes for force microscopy/spectroscopy. Nanotechnology 1996, 7:259-262.
    • (1996) Nanotechnology , vol.7 , pp. 259-262
    • Gibson, C.T.1    Watson, G.S.2    Myhra, S.3
  • 40
    • 0027694550 scopus 로고
    • Scanning tunneling microscopy investigation of phosphorus-doped polycrystalline silicon films
    • Gonzo L., Lui A., Bisero D. Scanning tunneling microscopy investigation of phosphorus-doped polycrystalline silicon films. Mater. Lett. 1993, 18:50-56.
    • (1993) Mater. Lett. , vol.18 , pp. 50-56
    • Gonzo, L.1    Lui, A.2    Bisero, D.3
  • 41
    • 0002193058 scopus 로고    scopus 로고
    • Mechanical characterization of thick polysilicon films: Young's modulus and fracture strength evaluated with microstructures
    • Greek S., Ericson F., Johansson S., Fürtsch M., Rump A. Mechanical characterization of thick polysilicon films: Young's modulus and fracture strength evaluated with microstructures. J. Micromech. Microeng. 1999, 9:245-251.
    • (1999) J. Micromech. Microeng. , vol.9 , pp. 245-251
    • Greek, S.1    Ericson, F.2    Johansson, S.3    Fürtsch, M.4    Rump, A.5
  • 42
    • 0031553481 scopus 로고    scopus 로고
    • In situ tensile strength measurement and Weibull analysis of thick film and thin film micromachined polysilicon structures
    • Greek S., Ericson F., Johansson S., Schweitz J. In situ tensile strength measurement and Weibull analysis of thick film and thin film micromachined polysilicon structures. Thin Solid Films 1997, 292:247-254.
    • (1997) Thin Solid Films , vol.292 , pp. 247-254
    • Greek, S.1    Ericson, F.2    Johansson, S.3    Schweitz, J.4
  • 43
    • 0000357002 scopus 로고
    • The phenomena of rupture and flow in solids
    • Griffith A.A. The phenomena of rupture and flow in solids. Phil. Trans. Roy. Soc. A 1921, 221:163-198.
    • (1921) Phil. Trans. Roy. Soc. A , vol.221 , pp. 163-198
    • Griffith, A.A.1
  • 44
    • 84903429478 scopus 로고
    • The theory of rupture. In: "Proceedings of the 1st International Congress for Applied Mechanics," Delft, pp. 55--63.
    • A. A. Griffith, 1924, The theory of rupture. In: "Proceedings of the 1st International Congress for Applied Mechanics," Delft, pp. 55--63.
    • (1924)
    • Griffith, A.A.1
  • 45
    • 0026186714 scopus 로고
    • Surface micromachined pressure transducers
    • Guckel H. Surface micromachined pressure transducers. Sens. Actuat. A 1991, 28:133-146.
    • (1991) Sens. Actuat. A , vol.28 , pp. 133-146
    • Guckel, H.1
  • 46
    • 33749944166 scopus 로고
    • A simple technique for the determination of mechanical strain in thin films with applications to polysilicon
    • Guckel H., Randazzo T., Burns D.W. A simple technique for the determination of mechanical strain in thin films with applications to polysilicon. J. Appl. Phys. 1985, 57(5):1671-1674.
    • (1985) J. Appl. Phys. , vol.57 , Issue.5 , pp. 1671-1674
    • Guckel, H.1    Randazzo, T.2    Burns, D.W.3
  • 48
    • 0000859680 scopus 로고
    • A review of the Weibull distribution
    • Hallinan A.J. A review of the Weibull distribution. J. Quality Technol. 1993, 25(2):85-93.
    • (1993) J. Quality Technol. , vol.25 , Issue.2 , pp. 85-93
    • Hallinan, A.J.1
  • 49
    • 0036494734 scopus 로고    scopus 로고
    • In situ tensile testing of nano-scale specimens in SEM and TEM
    • Haque M.A., Saif M.T.A. In situ tensile testing of nano-scale specimens in SEM and TEM. Exp. Mech. 2002, 42(1):123-128.
    • (2002) Exp. Mech. , vol.42 , Issue.1 , pp. 123-128
    • Haque, M.A.1    Saif, M.T.A.2
  • 50
    • 0007544668 scopus 로고
    • A variational approach to the elastic behavior of multiphase materials
    • Hashin Z., Shtrikman S. A variational approach to the elastic behavior of multiphase materials. J. Mech. Phys. Solids 1963, 11:127-140.
    • (1963) J. Mech. Phys. Solids , vol.11 , pp. 127-140
    • Hashin, Z.1    Shtrikman, S.2
  • 51
    • 0035703367 scopus 로고    scopus 로고
    • Microsample tensile testing of LIGA nickel MEMS applications
    • Hemker K.J., Last H. Microsample tensile testing of LIGA nickel MEMS applications. Mater. Sci. Eng. A 2001, 319--321:882-886.
    • (2001) Mater. Sci. Eng. A
    • Hemker, K.J.1    Last, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.