CAD tools and foundries to boost microsystems development

Materials Science and Engineering B

Volumn 51, Issue 1-3, 1998, Pages 242-253

  Courtois, B ^a   Karam, J M ^a   Lubaszewski, M ^a   Szekely, V ^b   Rencz, M ^b   Hofmann, K ^c   Glesner, M ^c  

^a TIMA LABORATORY   (France)

^b BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

^c DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

CAD; Manufacturing; Microelectromechanical systems; Microsystems; Testing

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER AIDED MANUFACTURING; MATERIALS TESTING; MICROELECTRONICS; SOFTWARE PROTOTYPING;

MICROSYSTEM;

MICROELECTROMECHANICAL DEVICES;

EID: 0032000190     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(97)00269-9     Document Type: Article

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