Surface versus bulk micromachining: The contest for suitable applications

Journal of Micromechanics and Microengineering

Volumn 8, Issue 2, 1998, Pages 45-53

  French, P J ^a   Sarro, P M ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Laboratory for ECTM   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPETITION; ETCHING; MARKETING; MECHANICAL PROPERTIES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PRESSURE TRANSDUCERS; SILICON SENSORS; SILICON WAFERS;

BULK MICROMACHINING; SURFACE MICROMACHINING;

MICROELECTRONIC PROCESSING;

EID: 0032092146     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/2/002     Document Type: Article

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