Error limitations in the determination of mechanical properties of thin films

Journal of Reinforced Plastics and Composites

Volumn 16, Issue 1, 1997, Pages 17-32

  Breton, F A ^a   Knauss, W G ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ASPECT RATIO; ELASTIC MODULI; ERROR ANALYSIS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; STIFFNESS;

BIMATERIAL FILMS; CONTINUUM ANALYSIS; ISOTROPIC MATERIAL DESCRIPTION; MAP REFLECTION RELATIONSHIP; POISSON'S RATIO;

ULTRATHIN FILMS;

EID: 0030835164     PISSN: 07316844     EISSN: None     Source Type: Journal    
DOI: 10.1177/073168449701600103     Document Type: Article

References (9)

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3. Fang, W. and J. A. Wickert. 1994. "Post-Buckling of Micromachined Beams," Proceedings of IEEE Micro Electro Mechanical Systems.
4. Allen, M. G., M. Mehregany, R. T. Howe and S. D. Senturia. 1987. "Microfabricated Structures for the in situ Measurement of Residual Stresses, Young's Modulus, and Ultimate Strain of Thin Films," Applied Physics Letter, V51(4).
5. Tabata, O., K. Kawahata, S. Sugiyama and I. Igarashi. 1989. "Mechanical Property Measurements of Thin Films Using Load-Deflection of Composite Rectangular Membrane," Proceedings of IEEE Micro Electro Mechanical Systems, Salt Lake City.
6. Timoshenko, S. 1957. Theory of Plates and Shells, McGraw-Hill.
7. Allen, M. G. 1986, M.S. thesis, Department of Chemical Engineering, Massachusetts Institute of Technology, May 1986.
8. Breton, F. 1995. Engineer's thesis, Graduate Aeronatical Laboratory of the California Institute of Technology, April 1995.
9. Tabata, O., T. Tsushiya and N. Fujitsuka. 1994, "Poisson's Ratio Evaluation of Thin Film for Sensor Application," Technical Digest of the 12th Sensor Symposium, Tokyo.